Large field of view metrology: detecting critical edge placement error signatures not seen with small field of view in an HVM environment

Autor: Robinson, John C., Sendelbach, Matthew J., Ridane, Mohamed, Chen, Ivy, Song, Jaden, Nikolsky, Peter, Chen, Kuan-Ming, Lee, Shinyeong, Park, Sean, Lin, Kolos, Su, Yu-Chi, Cho, Kyoyeon, Yu, Ethan, Park, James, Elmalk, Abdalmohsen, Hsieh, Chih-Hung, Serebryakov, Alexander, Zhang, Lei, Jee, Taekwon, You, Joonsang, Lee, Hong-Goo, Park, Jongmin, Kim, Jungchan, Kim, Sang-Woo, Hong, Seungmo, Seo, Jaewook

Publikováno v: Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124963C-124963C-7, 1124675p

MECHANICAL AND TRIBOLOGICAL PROPERTIES OF SKIN STUDIED BY MICROSCALE INDENTATION AND SCRATCHING TECHNIQUES

Autor: Jee, Taekwon

Publikováno v: Jee, Taekwon. (2013). MECHANICAL AND TRIBOLOGICAL PROPERTIES OF SKIN STUDIED BY MICROSCALE INDENTATION AND SCRATCHING TECHNIQUES. UC Berkeley: Mechanical Engineering. Retrieved from: http://www.escholarship.org/uc/item/0vp2t1g5

Knowledge of the mechanical response and deformation behavior of individual skin layers during microprobe penetration is of high clinical and societal importance. In this thesis, the elastic behavior of stratum corneum, viable epidermis, dermis, and

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______325::5eb36b45fd99740192a3c79576c72ead
http://www.escholarship.org/uc/item/0vp2t1g5

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