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pro vyhledávání: '"Jean-Raoul Plaussu"'
Autor:
Jean-Raoul Plaussu, Emmanuel Defay, M. Bonvalot, Christophe Vallée, Thierry Baron, Maurice Kahn, Pierre Garrec, Catherine Dubourdieu, Serge Blonkowski
Publikováno v:
Microelectronics Reliability. 47:773-776
In this paper, we show that the capacitance–voltage linearity of MIM structures can be enhanced using SrTiO 3 (STO)/Y 2 O 3 dielectric bilayers. The C ( V ) linearity is significantly improved by combining two dielectric materials with opposite per