Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jean-Pierre Carrere"'
Publikováno v:
IRPS
Plasma charging damage induced on MOSFETs by a stripping process is compared between two CMOS image sensor technologies. The damage is modulated by the substrate configuration. Plasma non-uniformity is electrically characterized to determine the magn
Publikováno v:
2009 International Conference on Microelectronics - ICM.
We present a device structure consisting of a MOS transistor with additional lateral trench gate (LTG). It can be seen as two transistors with surface and lateral gates respectively sharing the same source and drain. The device can be implemented and