Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Jean-Marc Hueber"'
Publikováno v:
Applied Physics Letters. 61:2269-2271
A long pulse (up to 185 ns FWHM) KrCl laser at λ=222 nm has been achieved by combining x‐ray preionization and double discharge (spiker/sustainer) with fast ferrite magnetic switch. A relatively low pumping power (0.5 to 1 MW/cm3) and 25 cm gain l
Autor:
Dmitri V. Gaidarenko, Thomas Hofmann, Scot T. Smith, Kyle R. Webb, Herve A. Besaucele, William N. Partlo, Rick Eis, Paul C. Melcher, Vladimir B. Fleurov, Alexander I. Ershov, Bernard K. Nikolaus, Palash P. Das, Jean-Marc Hueber
Publikováno v:
SPIE Proceedings.
We report the performance of a very high repetition rate ArF laser optimized for next generation, high NA, high throughput scanner. The laser's repetition rate exceeds 4kHz, at 5mJ, and at bandwidths of less than 1.2 pm. We discuss the complexity of
Publikováno v:
SPIE Proceedings.
A molecular fluorine laser, specifically tailored for photolithography needs, was developed. Single line operation at 157.6nm was achieved by means of a prism assembly. Laser operation at repetition rates up to 1 kHz without signs of power saturation
Publikováno v:
SPIE Proceedings.
Improvement in efficiency and specific output energy on an XeCl long pulse laser ((lambda) equals 308 nm) and the first achievement of long pulse (150 ns FWHM) laser emission from KrCl (B - > X) at (lambda) equals 222 nm are reported. The system, whi
Autor:
Bernard M. Forestier, Philippe Ch. Delaporte, M. Boyomo Ngo Kobhio, Bernard L. Fontaine, Jean-Marc Hueber, Marc Sentis
Publikováno v:
SPIE Proceedings.
An experimental parametric study of a small volume x-ray preionized XeCl laser which uses the double discharge (spiker-sustainer) principle and a new fast ferrite magnetic switch is presented. This high-efficiency discharge excitation system, with a
Autor:
M. Boyomo Ngo Kobhio, Bernard L. Fontaine, Philippe Ch. Delaporte, Jean-Marc Hueber, Bernard M. Forestier, Marc Sentis
Publikováno v:
SPIE Proceedings.
A complete model of a long-pulse x-ray preionized self-sustained discharge XeCl excimer laser has been established for the case of excitation by an advanced electrical circuit associating a double discharge (spiker/sustainer) and a fast low-loss ferr
Autor:
Marc Sentis, Jean-Marc Hueber, Bernard L. Fontaine, Bernard M. Forestier, Philippe Ch. Delaporte, M. Boyomo Ngo Kobhio
Publikováno v:
SPIE Proceedings.
A complete model of the long pulse XeCI excimer laser excited by a double discharge with fast magnetic switch has been established for an Ne/Xe/HCI active medium. This model simulate one of the potential working conditions of the IMFM high average po
Autor:
M. N. Kobhio, Bernard L. Fontaine, Bernard M. Forestier, Ph. Delaporte, Jean-Marc Hueber, Marc Sentis
Publikováno v:
Journal de Physique IV Proceedings
Journal de Physique IV Proceedings, EDP Sciences, 1991, 01 (C7), pp.C7-567-C7-570. ⟨10.1051/jp4:19917151⟩
Journal de Physique IV Proceedings, EDP Sciences, 1991, 01 (C7), pp.C7-567-C7-570. ⟨10.1051/jp4:19917151⟩
Experimental results obtained with a high efficiency small volume long pulse X-Ray preionised XeCl laser with double discharge and very fast ferrite magnetic switch are presented and compared with the results given by a new XeCl laser numerical self
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c80872da2a5537ed1dd39d7fe730683f
https://hal.archives-ouvertes.fr/jpa-00250826/document
https://hal.archives-ouvertes.fr/jpa-00250826/document
Publikováno v:
SPIE Proceedings.
High efficiency X-ray Preioized discharge XeCl laser e,citation has been achieved with a Ne/Xe/HCI mixture in a 50 cm" active volume (25*21 cm'), by combining double discharge technique (spiker/sustainer) with a new fast ferrite magnetic switch. A fa
Conference
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