Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jean de Caunes"'
Autor:
Christophe Salagnon, Marc Mikolajczak, Joel Metz, Nicolas Chojnowski, R. Bouyssou, Alice Pelletier, Yoann Blancquaert, Frank Sundermann, Anna Phillips, Jean de Caunes, E. Batail, Thierry Devoivre, Bertrand Le Gratiet, Lionel Thevenon, Didier Gueze, Ahmed Oumina, Anne Strapazzon, Olivier Belmont, Jean Massin, Arthur Pelissier, E. Bernard, Marie-Pierre Baron, Benedicte Bry, Fabrice Bernard-Granger, Vincent Morin
Publikováno v:
SPIE Proceedings.
The main difficulty related to DoseMapper correction is to generate an appropriate CD datacollection to feed DoseMapper and to generate DoseRecipe in a user friendly way, especially with a complex process mix. We could heavily measure the silicon and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d089f02424e166e878645e3864d8d22d
https://doi.org/10.1117/12.911882
https://doi.org/10.1117/12.911882
Publikováno v:
SPIE Proceedings.
In the last years a flourishing number of techniques such as High Order Control or mappers have been proposed to improve overlay control. However a sustainable improvement requires sometimes understanding the underlying causes of the overlay limiting
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::adf096d6a6630cd3695b0d838e03aa7d
https://doi.org/10.1117/12.849245
https://doi.org/10.1117/12.849245
Autor:
Jan-Willem Gemmink, C. Monget, Marc Mikolajczak, Joost van Herk, Scott Warrick, Jean de Caunes, Bertrand Le Gratiet, Jean-Damien Chapon
Publikováno v:
SPIE Proceedings.
On-going complex integration schemes and developments in processes present significant challenges to lithography in manufacturing advanced semiconductor integrated circuits. Although APC solutions are in place to assist in achieving robust CD control
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6007824921ae2cb7963e8a0882d6dc66
https://doi.org/10.1117/12.657177
https://doi.org/10.1117/12.657177