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Autor:
Hyun-Kyung Chung, Mi-Young Song, Ji-Won Kwon, Myeong-Geon Lee, Jihoon Park, Namjae Bae, Jeamin Song, Gon-Ho Kim, Dipti, Yuri Ralchenko
Publikováno v:
Atoms, Vol 9, Iss 4, p 100 (2021)
Optical emission spectroscopy has been widely used in low-temperature argon plasma diagnostics. A coronal model is usually used to analyze the measured line ratios for diagnostics with a single temperature and density. However, many plasma processing
Externí odkaz:
https://doaj.org/article/8e646782936d4c1eb810c772bbc23cd2