Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Je Ha Kim"'
Publikováno v:
Journal of the Korean Physical Society. 56:96-99
Publikováno v:
ETRI Journal. 31:675-679
Ti x Si 1-x O y (TSO) thin films are fabricated using plasma-enhanced atomic layer deposition. The Ti content in the TSO films is controlled by adjusting the sub-cycle ratio of TiO 2 and SiO 2 . The refractive indices of SiO 2 and TiO 2 are 1.4 and 2
Publikováno v:
Japanese Journal of Applied Physics. 49:04DP09
Ga-doped zinc oxide (GZO) films were deposited using rf magnetron sputter deposition and a Ga2O3(5 wt %)-doped ZnO ceramic target under various deposition conditions. The effects of each deposition condition on the electrical, structural, and optical
Publikováno v:
ETRI Journal; 2009, Vol. 31 Issue 6, p675-679, 5p, 1 Diagram, 1 Chart, 4 Graphs
Publikováno v:
IEEE Journal of Selected Topics in Quantum Electronics; May/Jun2003, Vol. 9 Issue 3, p770-775, 6p