Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Je Bum Yoon"'
Autor:
Donggun Park, Sung Hwan Kim, Byung-Il Ryu, Dong-Won Kim, Heungsik Park, Im Soo Park, Je Bum Yoon, S. J. Hong, Na-Young Kim, Yong Lack Choi, Chang Woo Oh, Hyun Jun Bae, Sung-Han Kim
Publikováno v:
2006 International Electron Devices Meeting.
In this article, we proposed and successfully demonstrated 25 nm TiN metal gate nanorod transistors with laterally and vertically scaled actives without process burdens. They showed the excellent short channel effect immunity and high current drivabi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1a152d94aa6d9d00d7eb5ade7f5e6e3
https://doi.org/10.1109/iedm.2006.346927
https://doi.org/10.1109/iedm.2006.346927
Autor:
Je-Bum Yoon, Byung-Gook Kim, Hak-Seung Han, Woo-Sung Han, Se-Gun Moon, Seong-Yong Moon, Seong-Woon Choi
Publikováno v:
SPIE Proceedings.
Dissolved resist effect on the global CD has been studied in detail in an effort to understand the CD reduction phenomenon due to develop loading. Spin spray process also showed the loading effect although it is less than that of puddle process. In r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5403e6a936e94d9e56b425ab61e41f0a
https://doi.org/10.1117/12.569199
https://doi.org/10.1117/12.569199
Autor:
Yong-Jin Chun, Sang-Hee Lee, Suk-Joo Lee, Han-Ku Cho, Je-Bum Yoon, Doo-Youl Lee, Joo-Tae Moon
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:3105
As the overlay specification decreases drastically, it is necessary to consider how the total overlay is influenced by each contributing factor. In particular, it is expected that the contribution on overlay error budget can be quantitatively analyze
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88b832c245045758772a1f569bfc22cb
https://doi.org/10.1116/1.2395959
https://doi.org/10.1116/1.2395959
Autor:
Sung Hwan Kim, Chang Woo Oh, Yong Lack Choi, Sung-In Hong, Na Young Kim, Hyun Jun Bae, Sung-Han Kim, Heung Sik Park, Je Bum Yoon, Im Soo Park, Dong-Won Kim, Donggun Park, Byung-Il Ryu
Publikováno v:
2006 International Electron Devices Meeting; 2006, p1-4, 4p
Autor:
Doo-Youl Lee, Yong-Jin Chun, Je-Bum Yoon, Sang-Hee Lee, Suk-Joo Lee, Han-Ku Cho, Joo-Tae Moon
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Nov/Dec2006, Vol. 24 Issue 6, p3105-3109, 5p, 1 Diagram, 4 Graphs
Autor:
Sung Hwan Kim, Chang Woo Oh, Sung In Hong, Yong Lack Choi, Na Young Kim, Hyun Jun Bae, Ji-Hyun Lee, Kong Soo Lee, Je Bum Yoon, Dong-Won Kim, Donggun Park
Publikováno v:
2006 IEEE international SOI Conference Proceedings; 2006, p23-24, 2p