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Publikováno v:
Review of Scientific Instruments. 67:4130-4137
The characteristics of emissive probes in unmagnetized high pressure (≤1 Torr) argon and helium plasmas, produced by inductively coupled 13.56 MHz rf power, are studied. A procedure is given for interpreting emissive probe current–voltage (I–V)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19997f895b6ca55af64b77f51275b9a6
https://doi.org/10.1063/1.1147559
https://doi.org/10.1063/1.1147559
