Zobrazeno 1 - 10
of 80
pro vyhledávání: '"Jaume Verd"'
Publikováno v:
IEEE Access, Vol 12, Pp 75061-75071 (2024)
This article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as a front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode. The proposed solution is based on a capacit
Externí odkaz:
https://doaj.org/article/9c1a5feefd9344caa14d9744bb050ebb
Publikováno v:
Micromachines, Vol 12, Iss 1, p 82 (2021)
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical perfor
Externí odkaz:
https://doaj.org/article/4dea00972d5f4e0e8a075f93ee1846b9
Publikováno v:
Sensors, Vol 20, Iss 17, p 4663 (2020)
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance
Externí odkaz:
https://doaj.org/article/12f7a9bfa03b4fb3a10fe310297bbbcf
Autor:
Jaume Verd, Jaume Segura
Publikováno v:
Micromachines, Vol 10, Iss 4, p 273 (2019)
Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technol
Externí odkaz:
https://doaj.org/article/4817f836ff5a4381b91db2ca56c751e1
Publikováno v:
Micromachines, Vol 9, Iss 10, p 484 (2018)
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·cm−2·Hz−1. The resonator i
Externí odkaz:
https://doaj.org/article/58e72a6441d34ae0bc7e4b84adc3ea47
Publikováno v:
Sensors, Vol 18, Iss 9, p 3124 (2018)
We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometri
Externí odkaz:
https://doaj.org/article/230f23808e574861ad2a5382e96f0fa8
Publikováno v:
IEEE Sensors Journal. 23:34-52
Autor:
Rafel Perelló-Roig, Jaume Verd, Sebastià Bota, Bartomeu Soberats, Antonio Costa, Jaume Segura
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publikováno v:
2022 IEEE Sensors.
Autor:
Bartomeu Soberats, Jaume Segura, Rafel Perelló-Roig, Antonio Costa, Sebastia Bota, Jaume Verd
Publikováno v:
Lab on a chip. 21(17)
CMOS–MEMS microresonators have become excellent candidates for developing portable chemical VOC sensing systems thanks to their extremely large mass sensitivity, extraordinary miniaturization capabilities, and on-chip integration with CMOS circuitr