Zobrazeno 1 - 10
of 43
pro vyhledávání: '"Jau, Jack"'
Publikováno v:
Journal of Climate and Applied Meteorology, 1987 Mar 01. 26(3), 363-373.
Externí odkaz:
https://www.jstor.org/stable/26183151
Publikováno v:
Microelectronic Engineering. 30:567-570
A scanning electron-beam wafer inspection system (SEMSpec) has been developed. This system uses a high current (30–50 nA) field emission source to produce a low energy (800 eV) inspection beam. High speed digital processing (108 pixels/sec) of the
Publikováno v:
SPIE Proceedings.
An inspection system has been developed that uses high-speed electron- beam imaging combined with digital image processing to automatically locate defects on semiconductor wafers. The system inspects wafers using a low beam energy of 0.8 KeV and a sc
Publikováno v:
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference; 2013, p310-314, 5p
Autor:
Boye, Carol, Standeart, Theodorus, Wang, Fei, Lei, Shuen Cheng, Chen, Shih-tsung, Jau, Jack, Tomlison, Derek
Publikováno v:
2012 SEMI Advanced Semiconductor Manufacturing Conference; 1/ 1/2012, p371-374, 4p
Akademický článek
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Autor:
Hiraka, Takaaki, Mizuochi, Jun, Nakanishi, Yuko, Yusa, Satoshi, Sasaki, Shiho, Kurihara, Masaaki, Toyama, Nobuhito, Morikawa, Yasutaka, Mohri, Hiroshi, Hayashi, Naoya, Xiao, Hong, Kuan, Chiyan, Wang, Fei, Ma, Long, Zhao, Yan, Jau, Jack
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74880T-74880T-12, 12p
Autor:
Xiao, Hong, Ma, Long, Wang, Fei, Zhao, Yan, Jau, Jack, Selinidis, Kosta, Thompson, Ecron, Sreenivasan, S. V., Resnick, Douglas J.
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74881V-74881V-11, 11p
Autor:
Shimomura, Takeya, Inazuki, Yuichi, Tsukasa, Abe, Takikawa, Tadahiko, Morikawa, Yasutaka, Mohri, Hiroshi, Hayashi, Naoya, Wang, Fei, Ma, Long, Zhao, Yan, Kuan, Chiyan, Xiao, Hong, Jau, Jack
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75201D-75201D-8, 8p
After development inspection (ADI) studies of photo resist defectivity of an advanced memory device.
Autor:
Kim, Hyung-Seop, Cho, Yong Min, Lee, Byoung-Ho, Yeh, Roland, Ma, Eric, Wang, Fei, Zhao, Yan, Kanai, Kenichi, Xiao, Hong, Jau, Jack
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75200J-75200J-11, 11p