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pro vyhledávání: '"Jason Harsch"'
Autor:
Bernd Brendel, Ute Buttgereit, Chris Constantine, Ludger U. Schneider-Stoermann, Mathias Irmscher, Dietmar Mueller, Kevin Cummings, Benjamin George Eynon, John M. Whittey, Kirk Miller, Jason Harsch, Peter Hudek, Dirk Beyer
Publikováno v:
SPIE Proceedings.
This work involved a demonstration of the infrastructure and the ability of mask-making equipment to produce 9 inch reticles. While the choices for this particular work made the timing and logistics long and complicated, we find that there currently
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dbe64e10ec3ef1b4e119b9dc5557a467
https://doi.org/10.1117/12.467495
https://doi.org/10.1117/12.467495
