Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jason Emans"'
Autor:
Kevin Drayton, Matthew Sendelbach, Alexander Elia, Padraig Timoney, Susan Emans, Darren Zingerman, Marjorie Cheng, Benny Vilge, Charles Kang, Timothy Hughes, Taher Kagalwala, Naren Yellai, Alok Vaid, Jason Emans, Ronald Fiege
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In semiconductor manufacturing, the time it takes for wafers to process through the line is of utmost importance. Any delay in the processing of these wafers is very costly to the foundry and the end customer. Cycle time is one of the key metrics tha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c28b5540552f4f3f687d57735f5ebe1
https://doi.org/10.1109/asmc.2019.8791789
https://doi.org/10.1109/asmc.2019.8791789
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The limitations of existing methodology to maintain metrology fleet matching and stability is being strained by increasingly complex integrations. As the number of measurements also increase within the integration, the ability to quickly detect issue
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::abfcff14a3b9dc33af19772f523da71a
https://doi.org/10.1109/asmc.2016.7491089
https://doi.org/10.1109/asmc.2016.7491089