Multiple phase silicon in submicrometer chips removed by diamond turning

Autor: Jasineviclus, R. G., Porto, A. J. V., Duduch, J. G., Paulo Sergio Pizani, Lanciotti Jr, F., Dos Santos, F. J.

Publikováno v: Journal of the Brazilian Society of Mechanical Sciences and Engineering v.27 n.4 2005
Journal of the Brazilian Society of Mechanical Sciences and Engineering
Associação Brasileira de Engenharia e Ciências Mecânicas (ABCM)
instacron:ABCM
Journal of the Brazilian Society of Mechanical Sciences and Engineering, Volume: 27, Issue: 4, Pages: 440-448, Published: DEC 2005
Scopus-Elsevier

Continuous chips removed by single point diamond turning of single crystal silicon have been investigated by means of Scanning Electron Microscopy/Transmission Electron Microscopy and micro-Raman Spectroscopy. Three different chip structures were pro

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