Zobrazeno 1 - 10
of 42
pro vyhledávání: '"Jarno Groenesteijn"'
Autor:
Yiyuan Zhao, Henk-Willem Veltkamp, Thomas V. P. Schut, Remco G. P. Sanders, Bogdan Breazu, Jarno Groenesteijn, Meint J. de Boer, Remco J. Wiegerink, Joost C. Lötters
Publikováno v:
Micromachines, Vol 11, Iss 6, p 561 (2020)
Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical
Externí odkaz:
https://doaj.org/article/d406e9c17f694cb59d3c401b2941c4e9
Publikováno v:
Micromachines, Vol 6, Iss 4, Pp 452-461 (2015)
In this paper we describe the development of a system and model to analyze the composition of gas mixtures up to four components. The system consists of a Coriolis mass flow sensor, density, pressure and thermal flow sensor. With this system it is po
Externí odkaz:
https://doaj.org/article/2bc1ca284a1a40438302f7e97ac387d0
Autor:
Remco Wiegerink, Theo Lammerink, Jarno Groenesteijn, Jeroen Haneveld, Ferry Postma, Marcel Katerberg, Wouter Sparreboom, Jan van de Geest, Joost Lötters
Publikováno v:
Micromachines, Vol 4, Iss 1, Pp 22-33 (2013)
In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The
Externí odkaz:
https://doaj.org/article/88ffbcab8cbd4889bdedacea865105df
Autor:
Remco J. Wiegerink, Jarno Groenesteijn, Jeroen Haneveld, Joost C. Lötters, Theo S.J. Lammerink
Publikováno v:
Micromachines, Vol 3, Iss 1, Pp 194-203 (2012)
We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partial
Externí odkaz:
https://doaj.org/article/81bde5b0b6c247df8279f9ba5ed6268d
Publikováno v:
Journal of microelectromechanical systems, 30(6), 885-896. IEEE
A micro Coriolis flow sensor accurately measures small mass flows without being affected by properties of the fluid. This paper presents a micro Coriolis mass flow sensor driven by PZT thin film piezoelectric actuators, which allows a combination of
Autor:
Hugo Bissig, Oliver Büker, Egbert van der Wouden, Joost Lötters, Jarno Groenesteijn, Andreia Furtado, Sara Moura, Seok Hwan Lee, Leslie Wale
In-line measurements of liquid properties are important for production processes or applications where different liquids are mixed. In healthcare applications, such as multi-infusion systems, different drugs are mixed to be administered to the patien
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2f4c958211ddfdbfc9bb7c2818810ed6
Autor:
Jarno Groenesteijn, M.J. de Boer, Henk-Willem Veltkamp, Remco J. Wiegerink, Yiping Zhao, Niels Roelof Tas, Y. L. Janssens, Joost Conrad Lötters
Publikováno v:
Journal of micromechanics and microengineering, 31(4):045013. IOP Publishing Ltd.
Micro-electro-mechanical-systems (MEMS) structures with different in-plane dimensions often need to be released simultaneously from the bulk of the wafer and a single dry etching or wet etching technique cannot fulfill all release requirements. In th
Publikováno v:
ISSCC
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers, 84-86
STARTPAGE=84;ENDPAGE=86;TITLE=2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers, 84-86
STARTPAGE=84;ENDPAGE=86;TITLE=2021 IEEE International Solid-State Circuits Conference, ISSCC 2021-Digest of Technical Papers
Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (
Autor:
Yiyuan Zhao, Henk-Willem Veltkamp, Thomas Schut, Jarno Groenesteijn, Boer, Meint J., Wiegerink, Remco J., Joost Conrad Lötters
Publikováno v:
ISSUE=4;STARTPAGE=116;ENDPAGE=119;TITLE=4th Conference on MicroFluidic Handling Systems, MFHS 2019
University of Twente Research Information (Pure Portal)
University of Twente Research Information (Pure Portal)
Surface Channel Technology is widely used as the fabrication process to make free-hanging microchannels in various microfluidic devices. In this extended abstract, we report an innovative fabrication method to embed highly-doped silicon electrodes be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::dd6556b1a5ca926faeb4fc2facebe3bb
https://research.utwente.nl/en/publications/269e6138-7d80-4d27-9fee-cf0222eb2304
https://research.utwente.nl/en/publications/269e6138-7d80-4d27-9fee-cf0222eb2304
Autor:
Qinwen Fan, A. C. de Oliveira, Remco J. Wiegerink, T. V. P. Schut, Kofi A. A. Makinwa, Jarno Groenesteijn
Publikováno v:
2019 IEEE Sensors: SENSORS 2019-Conference Proceedings
2019 IEEE Sensors
2019 IEEE Sensors, SENSORS 2019-Conference Proceedings, 2019-October
2019 IEEE Sensors
2019 IEEE Sensors, SENSORS 2019-Conference Proceedings, 2019-October
This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by cu