Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Jannick Langfahl-Klabes"'
Autor:
Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, Bodo Mickan, Ilia Kiselev, Michael Hauptmannl, Michael Drexel
Publikováno v:
Sensors, Vol 19, Iss 6, p 1410 (2019)
During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes th
Externí odkaz:
https://doaj.org/article/9c4464a37bcd4b0fb7c469f6a5ae3845
Autor:
Bodo Mickan, Thomas Ahbe, Lutz Doering, Michael Hauptmannl, Min Xu, Erwin Peiner, Uwe Brand, Michael Drexel, Heinrich Behle, Sebastian Bütefisch, Stefan Völlmeke, Thomas Frank, I. Kiselev, Jannick Langfahl-Klabes
Publikováno v:
Sensors
Volume 19
Issue 6
Sensors (Basel, Switzerland)
Sensors, Vol 19, Iss 6, p 1410 (2019)
Volume 19
Issue 6
Sensors (Basel, Switzerland)
Sensors, Vol 19, Iss 6, p 1410 (2019)
During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8af72e9db9d38e6bddc45e0b6bea8486
Autor:
Erwin Peiner, Mutaib Zackaria, Hutomo Suryo Wasisto, Jan Thiesler, Uwe Brand, Prabowo Puranto, Jannick Langfahl-Klabes, Wilson Ombati Nyang’au, Qiang Zhang, Zhi Li
Publikováno v:
Journal of Physics: Conference Series. 1837:012008
In this paper we present an investigation of the influence of nanoindentation location on the top surface of silicon micro-pillar. This silicon micro-pillar array which will be employed as a micro force sensor array based on three-dimension silicon (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef1ac35fef6efb1c3137a1cf07d58791
https://doi.org/10.1088/1742-6596/1837/1/012008
https://doi.org/10.1088/1742-6596/1837/1/012008
Autor:
Hutomo Suryo Wasisto, Uwe Brand, Zhi Li, Frank Pohlenz, Lars Daul, Jannick Langfahl-Klabes, Erwin Peiner, Gerry Hamdana, Prabowo Puranto
Publikováno v:
Journal of Physics: Conference Series. 1319:012008
In this paper we present an investigation of the influence of different roughness of etched silicon surfaces on the measured nanomechanical properties. For the etching, inductively coupled plasma (ICP) reactive ion etching (RIE) was performed on the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99206c58f8c3c4c810511aa06c107204
https://doi.org/10.1088/1742-6596/1319/1/012008
https://doi.org/10.1088/1742-6596/1319/1/012008
Autor:
Muhammad Fahlesa Fatahilah, Andreas Waag, Min Xu, Jannick Langfahl-Klabes, Uwe Brand, Andre Felgner, Hutomo Suryo Wasisto, Frank Pohlenz, Prabowo Puranto, Klaas Strempel, Erwin Peiner, Feng Yu, Zhi Li
Publikováno v:
Advanced Engineering Materials. 20:1800353
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e739b505c908cba91da8fa62200264c3
https://doi.org/10.1002/adem.201800353
https://doi.org/10.1002/adem.201800353
Autor:
Prabowo Puranto, Gerry Hamdana, Frank Pohlenz, Jannick Langfahl-Klabes, Lars Daul, Zhi Li, Hutomo Suryo Wasisto, Erwin Peiner, Uwe Brand
Publikováno v:
Journal of Physics: Conference Series; 2019, Vol. 1319 Issue 1, p1-1, 1p