Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jann Shyang Liang"'
Autor:
Jann-Shyang Liang, 梁建翔
91
In this thesis, the electrical and material characteristics of HfO2 deposited in a metal-organic chemical vapor deposition system are evaluated comprehensively. The influence of process parameters including gate electrode material, pre-deposi
In this thesis, the electrical and material characteristics of HfO2 deposited in a metal-organic chemical vapor deposition system are evaluated comprehensively. The influence of process parameters including gate electrode material, pre-deposi
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/00617503238531247530
Autor:
Peer Lehnen, Chun-Yen Chang, Bing-Yue Tsui, Ming Jui Yang, Chao-Hsin Chien, Ching Wei Chen, Jann Shyang Liang, Tsu Hsiu Perng
Publikováno v:
Japanese Journal of Applied Physics. 44:87
We have investigated the effects that various pre-deposition surface treatments, such as HF dipping (HF-dipped), NH3 surface nitridation (NH3-annealed), and rapid thermal oxidation (RTO-treated), have on the electrical properties of HfO2 gate dielect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6bf33ddec2e6e0cabb9c0698c6e689ac
https://doi.org/10.1143/jjap.44.87
https://doi.org/10.1143/jjap.44.87
