Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Janice Paduano"'
Autor:
Matthew P. McLaughlin, Petra Mennell, Andrew Stamper, Gabriel Barber, Janice Paduano, Emerson Benn, Michael Linnane, Justin Zwick, Chetan Khatumria, Robert L. Isaacson, Nathan Hoffman, Clayton Menser
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 35:418-424
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6add66dd9bcbbe5497c001155ea77e28
https://doi.org/10.1109/tsm.2022.3186607
https://doi.org/10.1109/tsm.2022.3186607
Autor:
Chetan Khatumria, Janice Paduano, Petra Mennell, Gabriel Barber, Justin Zwick, Michael Linnane, Matthew P. McLaughlin, Emerson Benn, Clayton Menser, Robert L. Isaacson, Nathan Hoffman, Andrew Stamper
Publikováno v:
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
A complementary Machine Learning disposition method was generated and tested for after develop inspections in lithography. For lithography coating defects, this new method showed twice the sensitivity and five times the specificity in a controlled ex
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99ef6c4eb369d8b64ec06e4a859422c6
https://doi.org/10.1109/asmc51741.2021.9435721
https://doi.org/10.1109/asmc51741.2021.9435721
Autor:
McLaughlin, Matthew P., Mennell, Petra, Stamper, Andrew, Barber, Gabriel, Paduano, Janice, Benn, Emerson, Linnane, Michael, Zwick, Justin, Khatumria, Chetan, Isaacson, Robert L., Hoffman, Nathan, Menser, Clayton
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing; Aug2022, Vol. 35 Issue 3, p418-424, 7p
Publikováno v:
Solid State Technology. Jun2000, Vol. 43 Issue 6, p159. 6p. 2 Color Photographs, 1 Black and White Photograph, 4 Diagrams, 1 Graph.
Autor:
Mack, Chris A.1 chris.a.mack@kla-tencor.com
Publikováno v:
Microlithography World. May2005, Vol. 14 Issue 2, p12-18. 3p. 3 Diagrams.