Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jangryul Park"'
Autor:
Jangryul Park, Youngsun Choi, Soonyang Kwon, Youngjun Lee, Jiwoong Kim, Jae-joon Kim, Jihye Lee, Jeongho Ahn, Hidong Kwak, Yusin Yang, Taeyong Jo, Myungjun Lee, Kwangrak Kim
Publikováno v:
Light: Science & Applications, Vol 13, Iss 1, Pp 1-14 (2024)
Abstract As semiconductor devices shrink and their manufacturing processes advance, accurately measuring in-cell critical dimensions (CD) becomes increasingly crucial. Traditional test element group (TEG) measurements are becoming inadequate for repr
Externí odkaz:
https://doaj.org/article/a25a851f4dcc4fcc9fe3ebbc71b740a3
Publikováno v:
Light: Science & Applications, Vol 11, Iss 1, Pp 1-14 (2022)
Abstract As smaller structures are being increasingly adopted in the semiconductor industry, the performance of memory and logic devices is being continuously improved with innovative 3D integration schemes as well as shrinking and stacking strategie
Externí odkaz:
https://doaj.org/article/5599fb7e3c534791b9815f15b9971561
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
We propose a novel spectrum measurement system named Microsphere-assisted nanospot spectroscopic reflectometry (MASR) by using the super-resolution image over the Rayleigh’s resolution limit in white-light. The proof of concept and optimal configur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e18af00c0fd45ed2ec91925c1d6508a2
https://doi.org/10.1117/12.2582269
https://doi.org/10.1117/12.2582269