Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jane Peterkin"'
Autor:
John A. Woollam, R. A. Synowicki, Jeff Hale, S. Zaat, S. Nafis, Jane Peterkin, Robert D. Kubik
Publikováno v:
Thin Solid Films. 206:254-258
Using variable angle spectroscopic ellipsometry and atomic force microscopy (AFM), the surface roughness and oxidation of aluminum and titanium thin films have been studied as a function of substrate deposition temperature and oxygen plasma exposure.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::051023629e275d02a493485bf98ce822
https://doi.org/10.1016/0040-6090(91)90431-v
https://doi.org/10.1016/0040-6090(91)90431-v
Publikováno v:
MRS Proceedings. 163
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7ffac16ecc8098855988ad2c36cdf6e2
https://doi.org/10.1557/proc-163-965
https://doi.org/10.1557/proc-163-965