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pro vyhledávání: '"Jan-Timo Liewald"'
Publikováno v:
Journal of Microelectromechanical Systems. 28:586-596
In this paper, we examine the origins of bias instability in three-axis, mode-matched MEMS gyroscopes. Reducing this drift phenomenon is crucial for highly accurate navigation in applications, such as automated driving or indoor localization. We show
Publikováno v:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
The working frequency f 0 of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f 0 we designed a new device with f 0 =100 kHz. Key parameters of the 100 kHz device are theoretic