Výsledky vyhledávání - "Jan O. Gaudestad"

Roughness and nanotopography measurement of a Silicon Wafer using Wave Front Phase Imaging : High speed single image snapshot of entire wafer producing sub nm topography data

Autor: J.M. Ramos-Rodriguez, Jan O. Gaudestad, J. M. Trujillo-Sevilla

Publikováno v: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

In this paper we introduce a new metrology technique for measuring wafer geometry on silicon wafers. Wave Front Phase Imaging (WFPI) has high lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a sin

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5f662b40dc2bcbe0919ec9b70ba68df8
https://doi.org/10.1109/asmc49169.2020.9185222

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High Speed Wafer Geometry on Silicon Wafers Using Wave Front Phase Imaging for Inline Metrology

Autor: Jan O. Gaudestad, J.M. Ramos-Rodriguez, J.M. Trujillo-Sevilla

Publikováno v: 2020 China Semiconductor Technology International Conference (CSTIC).

In this paper we introduce a new metrology technique for measuring wafer geometry on silicon wafers. Wafer geometry will be critical for the next generation integrated circuits (IC) for improvements in lithography overlay and to measure Nanotopograph

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::00d6e0122ee6f0577ffe0281776b222f
https://doi.org/10.1109/cstic49141.2020.9282496

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Free view point generation based on depth maps computed by a single camera

Autor: J. P. Luke, Jan O. Gaudestad, José Manuel Rodríguez-Ramos, Ángela Hernández-Delgado, Óscar Gómez-Cárdenes, Ricardo Oliva-García, Javier Martín-Hernández

Publikováno v: Three-Dimensional Imaging, Visualization, and Display 2020.

Points of view generation allows to create virtual views between two or more cameras observing a scene. This field receives attention from multimedia markets, because sufficiently realistic points of view generation should allow to navigate freely be

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f9bf786cc2668690092e8dbfca8e8352
https://doi.org/10.1117/12.2558063

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