Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jan Homilius"'
Autor:
Thomas Hingst, Thomas Marschner, Manfred Moert, Jan Homilius, Marco Guevremont, John Hopkins, Assim Elazami
Publikováno v:
SPIE Proceedings.
In the production of sub 140nm electronic devices, CD metrology is becoming more critical due to the increased demands placed on process control. CD metrology using CD-SEM is approaching its limits especially with respect to precision, resolution and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::42953e60cd7e64b83e8c97a8efe314f3
https://doi.org/10.1117/12.485011
https://doi.org/10.1117/12.485011
Autor:
Marschner, T., Stief, C.
Publikováno v:
Advanced Semiconductor Manufacturing Conference & Workshop, 2003 IEEEI/SEMI; 2003, p53-58, 6p