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Autor:
Jan F J⊘rgensen, Jonas Skovlund Madsen, Deepak Dwarakanath, Poul Erik Hansen, Brian Bilenberg, Morten Hannibal Madsen, Jesper Nygård, Pierre Boher
Publikováno v:
Journal of Micro and Nano-Manufacturing. 5
With new fabrication methods for mass production of nanotextured samples, there is an increasing demand for new characterization methods. Conventional microscopes are either too slow and/or too sensitive to vibrations. Scatterometry is a good candida