Zobrazeno 1 - 3
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pro vyhledávání: '"Jan Erjawetz"'
Autor:
Jan Erjawetz, Dominique Collé, Gerda Ekindorf, Peter Heyl, Daniel Ritter, Aditya Reddy, Helmut Schift
Publikováno v:
Micro and Nano Engineering, Vol 15, Iss , Pp 100137- (2022)
Laser-based pattern generators are versatile tools for transferring design layouts into resist structures. The non-linear response and the proximity effects caused by the interaction of the laser beam with the low-contrast photoresist are particularl
Externí odkaz:
https://doaj.org/article/4d19d48692bd425e854b1d0604693b83
Publikováno v:
Advances in X-Ray/EUV Optics and Components XVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b086022ee1d6bacf049098dd99272454
https://doi.org/10.1117/12.2633052
https://doi.org/10.1117/12.2633052
Publikováno v:
Journal of Vacuum Science & Technology B. 39:052603
Combining microstructures of different dimensions benefits from hybrid manufacturing strategies that use nanoimprint for generating regular large area structures and laser lithography for larger grayscale topography. While the individual processes ar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19f20e42dc585f38161f53d29eeba552
https://doi.org/10.1116/6.0001206
https://doi.org/10.1116/6.0001206