Zobrazeno 1 - 10
of 95
pro vyhledávání: '"James R. Engstrom"'
Publikováno v:
Chemistry of Materials. 32:6035-6042
Low-temperature, plasma-free atomic layer etching (ALE) of Pd0 is explored. A vacuum ultraviolet (VUV) light source (115 < λ < 400 nm) is used in conjunction with a controlled O2 gas exposure to pr...
Publikováno v:
ACS applied materialsinterfaces. 12(45)
Density functional theory (DFT) is used to better understand the oxidation of Pd metal using vacuum ultraviolet (VUV) light co-exposed with O2, which is known to produce O and O3. The oxidation of Pd metal arising from O, O2, and O3 is assessed on ba
Autor:
Pengyuan Zhao, Jonathan Wong, Ka Un Lao, Yan Yang, Hsin-Yu Ko, Robert A. DiStasio, Taewon Suh, James R. Engstrom
Publikováno v:
ACS applied materialsinterfaces. 12(8)
In this work, we have explored the use of a third species during chemical vapor deposition (CVD) to direct thin-film growth to occur exclusively on one surface in the presence of another. Using a combination of density functional theory (DFT) calcula
Publikováno v:
Journal of Vacuum Science & Technology A. 40:012201
We have examined the nucleation and growth of WSe2 thin films in ultrahigh vacuum on highly oriented pyrolytic graphite (HOPG) using in situ real-time x-ray fluorescence (XRF), and ex situ x-ray diffraction, x-ray photoelectron spectroscopy, scanning
Publikováno v:
The Journal of Physical Chemistry C. 121:8464-8472
We have examined the effect of growth rate on the growth mode of thin films of tetracene on SiO2 at a substrate temperature of 0 °C. For a preponderance of conditions examined here, only the thin-film phase is formed. From a combination of in situ r
Autor:
Rambert K. Nahm, James R. Engstrom
Publikováno v:
The Journal of Physical Chemistry C. 120:7183-7191
We have examined the growth of thin films of tetracene on SiO2 using in situ real time X-ray synchrotron radiation and ex situ atomic force microscopy. Using in situ X-ray reflectivity, we observe a transition from 3D island growth to 2D layer-by-lay
Publikováno v:
The Journal of Physical Chemistry C. 120:6165-6179
We have examined the growth of bilayers and superlattices of pentacene and perylene derivatives (PTCDI-Cn) using in situ real time X-ray synchrotron radiation techniques and ex situ atomic force microscopy. We find that the growth of PTCDI-Cn layers
Publikováno v:
The Journal of Physical Chemistry Letters. 7:642-646
Surface states of colloidal nanocrystals are typically created when organic surfactants are removed. We report a chemical process that reduces surface traps and tunes the interparticle coupling in PbS nanocrystal thin films after the surfactant ligan
Publikováno v:
Journal of Vacuum Science & Technology A. 38:062411
In this work, we investigate the atomic layer deposition (ALD) of ZrO2 thin films on Cu and SiO2 substrates, using Zr[N(C2H5CH3)]4 as the thin-film precursor, and H2O or O2 as the coreactants. Here, we introduce 3-hexyne as a coadsorbate molecule dur
Publikováno v:
The Journal of Physical Chemistry C. 116:21948-21960
We have examined the initial stages of atomic layer deposition (ALD) of TaNx on SiO2, a porous low-κ SiO2-based material, and both of these substrates modified by a branched interfacial organic layer, using in situ X-ray photoelectron spectroscopy (