Zobrazeno 1 - 2
of 2
pro vyhledávání: '"James N. Reck"'
Publikováno v:
Applied Surface Science. 258:5599-5604
Chemical and microstructural evaluation techniques have been used to characterize sputter deposited 100–150 nm thick BaTiO 3 nano-capacitors with 30 nm thick Ni electrodes fabricated on Si/SiO 2 wafers. More than 99% of devices had resistance > 20
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f34ea968e141e36643cc47ed7fbb057a
https://doi.org/10.1016/j.apsusc.2012.02.035
https://doi.org/10.1016/j.apsusc.2012.02.035
Publikováno v:
2006 5th IEEE Conference on Sensors.
Formation of the biorecognition layers within microfluidic sensor channels must be done after the completion of the channel structure since these layers cannot withstand the wafer bonding temperature. We propose a new post-bonding immobilization proc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::721aa4185da0a01017af9b3d89aefe87
https://doi.org/10.1109/icsens.2007.355548
https://doi.org/10.1109/icsens.2007.355548