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Autor:
L. Hornbeck, E. Chiu, P. Urbanus, Claude E. Tew, Kevin L. Kornher, James L. Conner, K. Komatsuzaki, Jianqing Lin
Publikováno v:
Proceedings of IEEE International Solid-State Circuits Conference - ISSCC '94.
Digital micromirror devices (DMDs), developed as spatial light modulators for video projection systems, have evolved to the hidden hinge concept. The DMD consists of a pair of torsion hinges that support a yoke assembly on which a mirror-supporting p