Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology

Autor: Christine Bunke, Mahmoud Khojasteh, James J. Steffes, Colin Goyette, Naftali E. Lustig, Stephan Grunow, Steven E. Molis, M. Zaitz, Leo Tai, Wei-Tsu Tseng, David Steber, Michael Kennett, Laertis Economikos, Adam Ticknor, Praneetha Poloju, Elliott Rill, Michael P. Chudzik, Vamsi Devarapalli, Connie Truong

Publikováno v: IEEE Transactions on Semiconductor Manufacturing. 26:493-499

A “hybrid” post Cu CMP cleaning process that combines acidic and basic clean in sequence is developed and implemented. The new process demonstrates the strengths of both acidic and basic cleans and achieves a more than 60% reduction in CMP defect

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::546b1e994315b4775c6aac5f28af911e
https://doi.org/10.1109/tsm.2013.2273124

Open side car heat exchanger that removes entire server heat load without any added fan power

Autor: Roger R. Schmidt, Donald W. Porter, Gerry Weber, M. Iyengar, David P. Graybill, James J. Steffes

Publikováno v: 2010 12th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems.

The heat dissipated by electronic equipment continues to increase at a alarming rate. This has occurred for products covering a wide range of applications. Manufacturers of this equipment require that the equipment be maintained within an environment

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4022ada7da87932c549d10eb7f0cd5cd
https://doi.org/10.1109/itherm.2010.5501423

Ultralow Voltage Manipulation of Ferromagnetism.

Autor: Prasad B; Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA., Huang YL; Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA.; Materials Sciences Division, Lawrence Berkeley Laboratory, Berkeley, CA, 94720, USA., Chopdekar RV; Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA., Chen Z; Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA., Steffes J; Institute of Materials Science, University of Connecticut, Storrs, CT, 06269, USA., Das S; Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA., Li Q; Department of Physics, University of California, Berkeley, CA, 94720, USA., Yang M; Department of Physics, University of California, Berkeley, CA, 94720, USA., Lin CC; Exploratory Integrated Circuits, Components Research, Intel Corp., Hillsboro, OR, 97124, USA., Gosavi T; Exploratory Integrated Circuits, Components Research, Intel Corp., Hillsboro, OR, 97124, USA., Nikonov DE; Exploratory Integrated Circuits, Components Research, Intel Corp., Hillsboro, OR, 97124, USA., Qiu ZQ; Department of Physics, University of California, Berkeley, CA, 94720, USA., Martin LW; Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA.; Materials Sciences Division, Lawrence Berkeley Laboratory, Berkeley, CA, 94720, USA., Huey BD; Institute of Materials Science, University of Connecticut, Storrs, CT, 06269, USA., Young I; Exploratory Integrated Circuits, Components Research, Intel Corp., Hillsboro, OR, 97124, USA., Íñiguez J; Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), Avenue des Hauts-Fourneaux 5, Esch-sur-Alzette, L-4362, Luxemburg.; Physics and Materials Science Research Unit, University of Luxembourg, 41 Rue du Brill, Belvaux, L-4422, Luxembourg., Manipatruni S; Exploratory Integrated Circuits, Components Research, Intel Corp., Hillsboro, OR, 97124, USA.; Kepler Computing, Hillsboro, OR, 97124, USA., Ramesh R; Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA.; Department of Physics, University of California, Berkeley, CA, 94720, USA.

Publikováno v: Advanced materials (Deerfield Beach, Fla.) [Adv Mater] 2020 Jul; Vol. 32 (28), pp. e2001943. Date of Electronic Publication: 2020 May 28.

Negative-pressure polymorphs made by heterostructural alloying.

Autor: Siol S; National Renewable Energy Laboratory, Golden, CO 80401, USA., Holder A; National Renewable Energy Laboratory, Golden, CO 80401, USA.; University of Colorado, Boulder, CO 80309, USA., Steffes J; University of Connecticut, Storrs, CT 06269, USA., Schelhas LT; SLAC National Accelerator Laboratory, Menlo Park, CA 94025, USA., Stone KH; SLAC National Accelerator Laboratory, Menlo Park, CA 94025, USA., Garten L; National Renewable Energy Laboratory, Golden, CO 80401, USA., Perkins JD; National Renewable Energy Laboratory, Golden, CO 80401, USA., Parilla PA; National Renewable Energy Laboratory, Golden, CO 80401, USA., Toney MF; SLAC National Accelerator Laboratory, Menlo Park, CA 94025, USA., Huey BD; University of Connecticut, Storrs, CT 06269, USA., Tumas W; National Renewable Energy Laboratory, Golden, CO 80401, USA., Lany S; National Renewable Energy Laboratory, Golden, CO 80401, USA., Zakutayev A; National Renewable Energy Laboratory, Golden, CO 80401, USA.

Publikováno v: Science advances [Sci Adv] 2018 Apr 20; Vol. 4 (4), pp. eaaq1442. Date of Electronic Publication: 2018 Apr 20 (Print Publication: 2018).