Zobrazeno 1 - 2
of 2
pro vyhledávání: '"James H. Hurst"'
Autor:
Craig S. Gittleman, Kenneth M. Rahmoeller, Mohammed Atwan, James H. Hurst, Andrew J. Maslyn, Ratandeep S. Kukreja, Yeh-Hung Lai
Publikováno v:
Journal of The Electrochemical Society. 165:F3217-F3229
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::626d6f0f658a45aefc1d2e9c2f1130bf
https://doi.org/10.1149/2.0241806jes
https://doi.org/10.1149/2.0241806jes
Autor:
Glennis J. Orloff, James H. Hurst
Publikováno v:
Review of Scientific Instruments. 65:2968-2974
The ability to produce high quality films in an electron cyclotron resonance reactor is dependent on the gas distribution system. In an effort to understand gas distribution effects, a variety of gas ring injection systems were implemented during sil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::529b3f8f908045f1b068e98d4952beaf
https://doi.org/10.1063/1.1144586
https://doi.org/10.1063/1.1144586