Zobrazeno 1 - 7
of 7
pro vyhledávání: '"James G. Tsacoyeanes"'
Autor:
James G. Tsacoyeanes, Gary Politi, Manfred Maul, Vladan Blahnik, Jan Baselmans, Michael Patra, A. S. Tychkov, Oscar Noordman
Publikováno v:
SPIE Proceedings.
In recent years the topic of speckle in optical projection microlithography received increasing interest because of its potential contribution to line width roughness (LWR). Speckle is a light interference effect that causes the dose delivered to the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2544b1d51068b9e28034d982eb95f91c
https://doi.org/10.1117/12.814169
https://doi.org/10.1117/12.814169
Autor:
Marie-Christine Zolcinski-Couet, Geoffrey O'Connor, Zoltan Gyarfas, James G. Tsacoyeanes, William Dornfeld, Pradeep K. Govil, Keith W. Andresen, Javed Sumra, Peter J. Baumgartner
Publikováno v:
Microlithographic Techniques in Integrated Circuit Fabrication II.
Micrascan (MS) IV is designed to provide superior Critical Dimension (CD) control & overlay performance at very high wafer throughputs for both 200 and 300mm wafers at low cost of ownership. This new system, targeted for sub-critical applications, in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1068ad4a24e2e68d41208d5d77cbbc6e
https://doi.org/10.1117/12.404856
https://doi.org/10.1117/12.404856
Autor:
James G. Tsacoyeanes
Publikováno v:
SPIE Proceedings.
Off-axis illumination is an optical enhancement method that has been widely used and discussed. The basic idea has been that for dense features, two diffracted orders 0th and 1st, symmetrically located about the optical axis of the projection optics,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95d314c21d7cb7b23bd4a26017ed7553
https://doi.org/10.1117/12.354392
https://doi.org/10.1117/12.354392
Publikováno v:
SPIE Proceedings.
A significant contributor to linewidth control in a step and scan system is the focal plane nonuniformity. The various sources contributing to this focus nonuniformity such as wafer and reticle flatness will be discussed. Effective wafer flatness pre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ddfa14696672e69b742b2a0297b52c22
https://doi.org/10.1117/12.310794
https://doi.org/10.1117/12.310794
Autor:
Gary Politi, Vladan Blahnik, Michael Patra, Jan Baselmans, Oscar Noordman, Manfred Maul, James G. Tsacoyeanes, A. S. Tychkov
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 8:043002
In recent years speckle in optical projection microlithography received increasing interest because of its potential contribution to linewidth roughness (LWR). Speckle is a light interference effect that causes the dose delivered to the reticle to be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c7128f779af79e23a5605e857d13b637
https://doi.org/10.1117/1.3256131
https://doi.org/10.1117/1.3256131
Autor:
James G. Tsacoyeanes
Publikováno v:
Electro-Optical Materials for Switches, Coatings, Sensor Optics, and Detectors.
It will be shown that a quartz crystal coated with single strand DNA can act as a sensor for hybridization in liquids. The method used is based on the change in oscillating frequency resulting from the increase in mass on the crystal surface which is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::49cf0e25ea5f1b0e121100e3efd428cc
https://doi.org/10.1117/12.21646
https://doi.org/10.1117/12.21646
Autor:
James G. Tsacoyeanes
Publikováno v:
Journal of Applied Physics. 64:32-36
In this paper, a theoretical investigation of the locking of two weakly coupled semiconductor lasers is presented. The analysis begins with a set of rate equations for the electric fields and carrier densities inside each laser diode cavity. From the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::100f5dbf5f9b76eb362f6b056e3069f9
https://doi.org/10.1063/1.341431
https://doi.org/10.1063/1.341431