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pro vyhledávání: '"James De Young"'
Autor:
Clement R. Yonker, George S. Deverman, Jay W. Grate, James B. McClain, John L. Fulton, James De Young
Publikováno v:
Polymer. 44:3627-3632
Application of nanometer thick fluoropolymer films onto metal and semiconducting substrates is described. In the first step, nanometer-sized polymer particles are generated by a process of homogeneous nucleation during the rapid expansion of supercri
Publikováno v:
SPIE Proceedings.
Pattern collapse and line width roughness (LWR) are two issues expected to become increasingly important as feature sizes approach those expected from EUV lithography. The unique physical properties of supercritical CO2 (low viscosity, zero surface t