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pro vyhledávání: '"James B. Mohr"'
Publikováno v:
Surface Roughness and Scattering.
Optical scatter measurements from polysilicon surfaces were performed using 632.8 nm illumination at 45 degrees and 488 nm illumination at 76.8 degrees. Scatter was recorded up to 60 degrees from the specular beam. Results are compared with surface s
Publikováno v:
Applied Optics. 32:3377
Optical-scatter measurements from polysilicon and aluminum surfaces were performed by using 632.8-nm illumination at 45 deg and 488-nm illumination at 76.8 deg. Scatter was recorded up to 60 deg from the specular beam by using a concentric ring photo