Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jae-Yung Bae"'
Autor:
Jun-Myeong Lee, Jong-Chan Lee, Seong-In Kim, Seung-Jae Lee, Jae-Yung Bae, Jin-Hyung Park, Jea-Gun Park
Publikováno v:
Nanomaterials, Vol 12, Iss 6, p 969 (2022)
To scale down semiconductor devices to a size less than the design rule of 10 nm, lithography using a carbon polymer hard-mask was applied, e.g., spin-on-carbon (SOC) film. Spin coating of the SOC film produces a high surface topography induced by pa
Externí odkaz:
https://doaj.org/article/dae8a253767d4fe587b2130c17e63c87
Publikováno v:
Japanese Journal of Applied Physics. 48:120204
The carrier transport kinetics of the TiO2 film doped with N (TiO2:N) were investigated by measuring the current and open circuit potential transients under light on/off illumination. These measurements were compared to an undoped film. The N in TiO2
Autor:
Lee, Jun-Myeong, Lee, Jong-Chan, Kim, Seong-In, Lee, Seung-Jae, Bae, Jae-Yung, Park, Jin-Hyung, Park, Jea-Gun
Publikováno v:
Nanomaterials (2079-4991); Mar2022, Vol. 12 Issue 6, p969, 13p