Zobrazeno 1 - 2
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pro vyhledávání: '"Jae-Woo Myung"'
Autor:
Chan Hyoung Kang, Jae-Woo Myung
Publikováno v:
Journal of the Korean institute of surface engineering. 47:75-80
Publikováno v:
Journal of the Korean institute of surface engineering. 46:145-152
The growth behavior of nanocrystalline diamond (NCD) film has been studied for three different substrates, i.e. bare Si wafer, 1 thick W and Ti films deposited on Si wafer by DC sputter. The surface roughness values of the substrates measured by AFM