Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jae-Woo Myung"'
Autor:
Chan Hyoung Kang, Jae-Woo Myung
Publikováno v:
Journal of the Korean institute of surface engineering. 47:75-80
Publikováno v:
Journal of the Korean institute of surface engineering. 46:145-152
The growth behavior of nanocrystalline diamond (NCD) film has been studied for three different substrates, i.e. bare Si wafer, 1 thick W and Ti films deposited on Si wafer by DC sputter. The surface roughness values of the substrates measured by AFM
Publikováno v:
Korean Journal of Chemical Engineering; Nov1999, Vol. 16 Issue 6, p784-788, 5p