Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jae-Ok Ryu"'
Publikováno v:
Solid State Phenomena. 92:239-242
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37b73c3cbb310a9f11b904e055421762
https://doi.org/10.4028/www.scientific.net/ssp.92.239
https://doi.org/10.4028/www.scientific.net/ssp.92.239
Publikováno v:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV.
The bitline contact hole and the storage node contact hole of 0.22 micrometers in 1G DRAM device manufacturing of 0.18 micrometers design rule were formed with thin nitride barrier self- aligned contact (TNBSAC) technology. In this work the isotropic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb36c8df1ada85ab1a6389bf3df2840e
https://doi.org/10.1117/12.324340
https://doi.org/10.1117/12.324340