Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jae Hyoung Youn"'
Publikováno v:
Solar Energy Materials and Solar Cells. 69:139-145
We studied the deposition of polycrystalline silicon (poly-Si) using SiH4/SiH2Cl2/H2 mixtures by inductively coupled plasma chemical vapor deposition. The deposition rate and crystalline quality were improved by increasing RF power. The poly-Si film
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e73375c8797bfcbb85ddc78c2e8c291
https://doi.org/10.1016/s0927-0248(00)00387-1
https://doi.org/10.1016/s0927-0248(00)00387-1
Publikováno v:
MRS Proceedings. 685
Polycrystalline silicon thin films have been deposited by an inductively coupled plasma chemical vapor deposition using SiH4/H2 mixtures. The quality of poly-Si can be improved by increasing RF power and hydrogen dilution ratio. The poly-Si deposited
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b3c7b8892163fc63857f645c9fe4cf0
https://doi.org/10.1557/proc-685-d5.2.1
https://doi.org/10.1557/proc-685-d5.2.1
Publikováno v:
Solar Energy Materials & Solar Cells. Sep2001, Vol. 69 Issue 2, p1. 1p.