Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jacques Margail"'
Publikováno v:
ECS Transactions. 3:79-90
Direct wafer bonding is a generic technology enabling the fabrication of innovative structures. Adequate surface treatments allow bonding of virgin as well as partially or fully processed wafers, leading to new Anti-sticking BSOI, Patterned BSOI and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f979163e649545fd252e7d6baa325ae
https://doi.org/10.1149/1.2357057
https://doi.org/10.1149/1.2357057
Autor:
Fabrice Casset, Laurent Jocou, Thomas Jager, Claire Divoux, Julien Charton, Eric Stadler, Jacques Margail, Thierry Enot, Wilfrid Schwartz
Publikováno v:
Scopus-Elsevier
The application of adaptive optics in astronomy requires increasingly compact deformable optical components with a high density of actuators, able to provide strokes of several micrometers. The main problem of the use of adaptive optics in more mains
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4eb4bc63ba218e0f1848462c3f2fefcf
https://doi.org/10.1117/12.477924
https://doi.org/10.1117/12.477924
Publikováno v:
SPIE Proceedings.
Decreasing dimensions of features in semiconductor device manufacturing makes it imperative to control the sidewall, line and line-edge roughness. The roughness contributes to the variation in critical dimension (CD) and it might affect device functi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f47861636ccea8e83a97bcb4922d48f
https://doi.org/10.1117/12.436800
https://doi.org/10.1117/12.436800