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Publikováno v:
ACS Applied Materials & Interfaces. 12:14280-14288
Designing a thin-film structure often begins with choosing a film deposition method that employs a specific process by which chemical species are formed and transported; in other words, a film deposition system in which two deposition methods are hyb
Autor:
Soren A. Tornoe, Jacob H. Sands, Sreyes P. Venkatesh, Nobuhiko P. Kobayashi, Greyson R. Shoop
Publikováno v:
Low-Dimensional Materials and Devices 2021.
Depositing thin films is often limited to a specific deposition process by which precursors are transported in a deposition environment. In other words, a deposition environment in which two deposition processes complementary to each other are unifie
Publikováno v:
Low-Dimensional Materials and Devices 2020.
Depositing thin films is often limited to a specific deposition process by which precursors are transported and reacted in a deposition environment. In other words, a deposition environment in which two deposition processes are unified should offer a