Review article: recommended reading list of early publications on atomic layer deposition - outcome of the 'virtual Project on the History of ALD'

Autor: Riikka L. Puurunen, Mikhail Chubarov, Tommi Kääriäinen, Cheol Seong Hwang, Çaǧla Özgit-Akgün, Geert Rampelberg, Erwan Rauwel, Rong Chen, Anjana Devi, David Campbell Cameron, Thomas E. Seidel, Jussi Lyytinen, Liliya Elnikova, A. A. Malkov, Markku Leskelä, Georgi Popov, Henrik Pedersen, Tanja Kallio, A. Outi I. Krause, Jaana Kanervo, Jakob Kuhs, Tobias Törndahl, Gloria Gottardi, A. A. Malygin, Nathanaelle Schneider, Fred Roozeboom, Małgorzata Norek, Marja-Leena Kääriäinen, Adam A. Łapicki, Dohan Kim, Irina Kärkkänen, Fabien Piallat, Harri Lipsanen, Esko Ahvenniemi, Oili Ylivaara, Lev Klibanov, Jyrki Molarius, Claudia Wiemer, Shih Hui Jen, J. Ruud van Ommen, Andrew R. Akbashev, Kestutis Grigoras, Dmitry Suyatin, Christian Militzer, Yury Koshtyal, Hele Savin, Jonas Sundqvist, Timo Sajavaara, Luca Lamagna, Véronique Cremers, Stefan Ivanov Boyadjiev, Mikhail Panov, Saima Ali, Oksana Yurkevich, Dennis M. Hausmann, Ivan Khmelnitskiy, Hossein Salami, Viktor Drozd, Mikhael Bechelany, Robin H. A. Ras, Abdelkader Mennad, Maria Berdova

Publikováno v: Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films, 35(1)
Journal of Vacuum Science and Technology A
Journal of Vacuum Science and Technology A, American Vacuum Society, 2017, 35 (1), ⟨10.1116/1.4971389⟩
Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 35(1):010801, 1-13. AVS Science and Technology Society
Ahvenniemi, E, Akbashev, A, Ali, S, Bechelany, M, Berdova, M, Boyadjiev, S, Cameron, D, Chen, R, Chubarov, M, Cremers, V, Devi, A, Drozd, V, Elnikova, L, Gottardi, G, Grigoras, K, Hausmann, D, Hwang, C S, Jen, S-H, Kallio, T, Kanervo, J, Khmelnitskiy, I, Kim, D H, Klibanov, L, Koshtyal, Y, Krause, O, Kuhs, J, Kärkkänen, I, Kääriäinen, M-L, Kääriäinen, T, Lamagna, L, Lapicki, A, Leskelä, M, Lipsanen, H, Lyytinen, J, Malkov, A, Malygin, A, Mennad, A, Militzer, C, Molarius, J, Norek, M, Özgit-Akgün, Ç, Panov, M, Pedersen, H, Piallat, F, Popov, G, Puurunen, R, Rampelberg, G, Ras, R H A, Rauwel, E, Roozeboom, F, Sajavaara, T, Salami, H, Savin, H, Schneider, N, Seidel, T E, Sundqvist, J, Suyatin, D, Törndahl, T, van Ommen, J R, Wiemer, C, Ylivaara, O & Yurkevich, O 2017, ' Review Article: Recommended reading list of early publications on atomic layer deposition : Outcome of the "Virtual Project on the History of ALD" ', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 35, no. 1, 010801 . https://doi.org/10.1116/1.4971389
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2, 35
Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A, 2017, 35 (1), ⟨10.1116/1.4971389⟩

Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fa895b65e04c902eab774083e92e5f89
https://doi.org/10.1116/1.4971389

ZrO2 Acting as a Redox Catalyst

Autor: Karoliina Honkala, E. I. Kauppi, Leon Lefferts, Jaana Kanervo, A. O. I. Krause

Publikováno v: Topics in catalysis, 59(8-9), 823-832. Springer

Surface defects are discussed and reviewed with regards to the use of ZrO2 in applications involving interactions with CO, H2, CH4, CO2, water and hydrocarbons. Studies of catalytic partial oxidation of methane reveal that part of the surface lattice

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8dcde90d722c51b80c63ff4abe52d97a
https://doi.org/10.1007/s11244-016-0556-4

1-Butanol dehydration in microchannel reactor: Kinetics and reactor modeling

Autor: Yaseen Khan, Jaana Kanervo, Juha Lehtonen, Minna Marin, Reetta Karinen

Publikováno v: Chemical Engineering Science. 137:740-751

A structured microchannel reactor (MCR) coated with pure γ-Al2O3 was applied to investigate 1-butanol dehydration under atmospheric and isothermal conditions. Kinetic experiments were carried out and the advantages related to mass transfer propertie

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e9732e7a34d1003408c34d8734aee5a7
https://doi.org/10.1016/j.ces.2015.07.026

Review: monoclinic zirconia, its surface sites and their interaction with carbon monoxide

Autor: Jaana Kanervo, Leon Lefferts, Sonja Kouva, Karoliina Honkala

Publikováno v: Catalysis science & technology, 5(7), 3473-3490. Royal Society of Chemistry

This review concerns monoclinic zirconia, its surface sites and their probing with carbon monoxide. The surface sites and their modifications using thermal treatments with vacuum or reactive gases are also included. In this work, we present informati

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8e777b740c13e14778d4a54ad92f4ad2
https://doi.org/10.1039/c5cy00330j

Water and carbon oxides on monoclinic zirconia: experimental and computational insights

Autor: Jenni Andersin, Karoliina Honkala, Jaana Kanervo, Leonardus Lefferts, Sonja Kouva, Juha Lehtonen

Publikováno v: Physical chemistry chemical physics, 16(38), 20650-20664. Royal Society of Chemistry

Zirconium oxide (ZrO2, zirconia) is an interesting catalytic material to be used in biomass conversion, e.g., gasification and reforming. In this work, we show that reducing and hydrating pretreatments affect the surface sites on monoclinic zirconia.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::38b1bbcea0739236ec99ec23250650ed
https://doi.org/10.1039/c4cp02742f