Zobrazeno 1 - 10
of 31
pro vyhledávání: '"JOHN A. MARSELLA"'
Publikováno v:
Handbook of Cleaning in Semiconductor Manufacturing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b4cd4e325c7e1bd84e08299fd3db204
https://doi.org/10.1002/9781118071748.ch16
https://doi.org/10.1002/9781118071748.ch16
Publikováno v:
Handbook of Cleaning in Semiconductor Manufacturing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdf0d1269e3207197b9c785a630ee58d
https://doi.org/10.1002/9781118071748.ch4
https://doi.org/10.1002/9781118071748.ch4
Autor:
Thomas John Markley, Young-Je Kwark, Vladimir Jakubek, Katsuji Douki, Eric Anthony Robertson, Richard Van Court Carr, Daniel Miller, Vaishali R. Vohra, Will Conley, Paul Zimmerman, Christopher K. Ober, John Anthony Marsella, Xiang-Qian Liu
Publikováno v:
Journal of Photopolymer Science and Technology. 16:573-580
Several strategies were employed to improve the transparency and etch resistance of the acrylate-based 157 nm photoresists. (1) α-Fluorinated acrylates were synthesized and polymerized using radical initiation. The homopolymer of 2-[4-(2-hydroxy-hex
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c4dc1192b863100f8dbc62185afbab4c
https://doi.org/10.2494/photopolymer.16.573
https://doi.org/10.2494/photopolymer.16.573
Publikováno v:
Journal of Polymer Science Part A: Polymer Chemistry. 38:921-930
Kinetic studies established that the monomethylation of a primary amine leads to significantly higher reaction rates with glycidyl ethers. The relative rates for approximately 25 amines were determined in an alcohol solvent under pseudo-first-order c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::934443c96eaefab29af309ffb9469802
https://doi.org/10.1002/(sici)1099-0518(20000301)38:5<921::aid-pola17>3.0.co
https://doi.org/10.1002/(sici)1099-0518(20000301)38:5<921::aid-pola17>3.0.co
Publikováno v:
Journal of Molecular Catalysis. 78:31-42
Copper(II), palladium(II) and silver(I), in conjunction with non-coordinating anion environments, have been found to catalyze the hydration of a variety of functionalized and nonfunctionalized alkynes. Suitable anions include trifluoromethane sulfona
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed78c5dfffcfba9b9fe66846750b1a37
https://doi.org/10.1016/0304-5102(93)87031-3
https://doi.org/10.1016/0304-5102(93)87031-3
Publikováno v:
ChemInform. 23
Perfluorocycloaliphatic compounds are reduced by solutions of the sodium benzophenone radical anion to give perfluorinated and highly fluorinated aromatic compounds. Perfluorocycloalkanes containing tertiary carbon centers are much more reactive than
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fe5ba09c18705e01daa597f028b75dd7
https://doi.org/10.1002/chin.199242103
https://doi.org/10.1002/chin.199242103
Publikováno v:
The Journal of Organic Chemistry. 57:2856-2860
Perfluorocycloaliphatic compounds are reduced by solutions of the sodium benzophenone radical anion to give perfluorinated and highly fluorinated aromatic compounds. Perfluorocycloalkanes containing tertiary carbon centers are much more reactive than
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4bba7d1c35ed4522c9c4f0b0fdb2ca6a
https://doi.org/10.1021/jo00036a019
https://doi.org/10.1021/jo00036a019
Autor:
John Anthony Marsella
Publikováno v:
Journal of Organometallic Chemistry. 407:97-105
The selectivity of reactions of ethylene glycol with primary amines in the presence of RuCl2(PPh3)3 at 120°C is highly dependent on the steric nature of the amine. Selectivity to di-amination is favored by smaller alkyl groups on the amine while lar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69759640f1835be53038df528e05685a
https://doi.org/10.1016/0022-328x(91)83143-r
https://doi.org/10.1016/0022-328x(91)83143-r
Autor:
Thomas John Markley, John Anthony Marsella, Richard Van Court Carr, Eric Anthony Robertson, Atteye Houssein Abdourazak
Publikováno v:
SPIE Proceedings.
Norbornene monomers with fluorinated substituents are often used in copolymers targeted for photoresist applications at 157 nm. Homopolymers of these norbornene monomers typically exhibit an absorption coefficient greater than 1.5 μm -1 . Comonomers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eb89c207a4c5b52d00375ed78a98a943
https://doi.org/10.1117/12.535613
https://doi.org/10.1117/12.535613