Zobrazeno 1 - 3
of 3
pro vyhledávání: '"JJ Jan-Jaap Koning"'
Autor:
van Jtm Joost Beek, JJ Jan-Jaap Koning, van der C Avoort, Mag Matthijs Suijlen, Herman Herman Beijerinck
Publikováno v:
Sensors and Actuators, A: Physical, 175, 139-149. Elsevier
A method is presented to rapidly characterize the hermeticity of a vacuum cavity for a high frequency (omega(0)/(2 pi)= 56 MHz) micromechanical bulk-wave resonator. The method relies on operating the device in a low-stiffness out-of-plane resonance m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1410d21f9dfa9cc8b40af00484cc370a
https://doi.org/10.1016/j.sna.2011.12.039
https://doi.org/10.1016/j.sna.2011.12.039
Publikováno v:
Sensors and Actuators, A: Physical, 156(1), 171-179. Elsevier
We introduce an analytical model for the gas damping of a MEMS resonator in the regime of free molecular flow. Driving force in this model is the change in density in the gap volume due to the amplitude of the oscillating microstructure, which is cou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::78254cd6fe9c12fb7e596046de6cd020
https://research.tue.nl/en/publications/72676bbb-f655-4d92-8483-b60129c1a445
https://research.tue.nl/en/publications/72676bbb-f655-4d92-8483-b60129c1a445
Publikováno v:
Cryogenics. 38:329-335
In this paper, the dynamic behaviour of the temperature profiles in the regenerator and in the gas near the hot and cold ends of the tube are discussed. The operation of a single-orifice pulse tube is described in general thermodynamical terms. This
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e5a6ac2d1457674ac3829485880227b
https://doi.org/10.1016/s0011-2275(97)00164-1
https://doi.org/10.1016/s0011-2275(97)00164-1