Zobrazeno 1 - 2
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pro vyhledávání: '"J.t.m. Beek"'
Autor:
Anne Jourdain, M. Paillard, Peter G. Steeneken, Th. G. S. M. Rijks, J.t.m. Beek, Jeroen De Coster, J.L. Cazaux, G. Puyatier, Claude Drevon, Hendrikus Tilmans
Publikováno v:
2006 European Microwave Conference.
This paper presents the implementation and test of prototype RF MEMS based voltage controlled oscillators (VCO) for space applications. RF MEMS tunable capacitors based on a dual gap architecture have been manufactured with a thin film technology on
Publikováno v:
2006 IEEE International Frequency Control Symposium and Exposition.
A novel bulk mode MEMS resonator is presented where mechanical motion is detected using the piezoresistive properties of Si. The piezoresistive readout allows for a high transduction efficiency. The transconductance gm obtained in this manner can be