Zobrazeno 1 - 10
of 104
pro vyhledávání: '"J.F. Creemer"'
Autor:
Joerg R. Jinschek, Pleun Dona, C. F. Elkjcer, Stig Helveg, S. P. Jespersen, J.F. Creemer, Luigi Mele, B. Hendriksen, I. Chorkendorff, Patricia J. Kooyman, C. Damsgaard, Søren Bastholm Vendelbo
Publikováno v:
Microscopy and Microanalysis. 24:232-233
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bd0340d1e5402d65e8b077b0d63d3095
https://doi.org/10.1017/s1431927618001654
https://doi.org/10.1017/s1431927618001654
Autor:
J.F. Creemer, Stig Helveg, S.B. Vendelbo, Bruno Morana, Luigi Mele, Patricia J. Kooyman, B. J. Nelissen, Pleun Dona
Publikováno v:
Ultramicroscopy. 133:72-79
In situ high-resolution transmission electron microscopy (TEM) of solids under reactive gas conditions can be facilitated by microelectromechanical system devices called nanoreactors. These nanoreactors are windowed cells containing nanoliter volumes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ce21203f02a6fd9b802382050c525c6c
https://doi.org/10.1016/j.ultramic.2013.04.004
https://doi.org/10.1016/j.ultramic.2013.04.004
Publikováno v:
Materials Chemistry and Physics. 139:654-662
We investigate on the physical and chemical properties of non-stoichiometric amorphous silicon carbide (a-SiCx) thin layers deposited by low-pressure chemical vapor deposition (LPCVD). Characterizations are specifically tailored to understand the sui
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::547d9f06becf750a9b7e9005ee937331
https://doi.org/10.1016/j.matchemphys.2013.02.013
https://doi.org/10.1016/j.matchemphys.2013.02.013
Autor:
T. Rossi, J.F. Creemer, Hugo Schellevis, Pasqualina M. Sarro, Luigi Mele, E. Iervolino, Fabio Santagata, A.T. Tran, M. Mihailovic
Publikováno v:
Sensors and Actuators A: Physical. 188:173-180
This paper presents a fabrication process for high-temperature MEMS microhotplates that uses sputtered molybdenum as a conductive material. Molybdenum has a high melting point (2693 °C, bulk) and is simpler to deposit and pattern in larger series th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::135aced3a3bb835ab884013c7e7fc4cd
https://doi.org/10.1016/j.sna.2011.11.023
https://doi.org/10.1016/j.sna.2011.11.023
Publikováno v:
Journal of Microelectromechanical Systems. 21:100-109
In this paper, a thin-film packaging approach is developed. It is meant to provide microelectromechanical systems (MEMS) devices with hermetic encapsulation that is sufficiently strong for transfer molding. A flat slab structure supported by columns
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::971fe0ee35de227da369003ba539304a
https://doi.org/10.1109/jmems.2011.2170817
https://doi.org/10.1109/jmems.2011.2170817
Autor:
Fabio Santagata, J.F. Creemer, A.W. van Herwaarden, Pasqualina M. Sarro, Luigi Mele, E. Iervolino
Publikováno v:
Journal of Microelectromechanical Systems. 20:676-684
We present a micromachined Pirani gauge that combines low detection limit and strongly reduced footprint. It consists of a tube-shaped resistor that is buried in the silicon substrate. The choice of the tube geometry gives the resistor a very high st
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89985b5260dde2a7c705dd2783ba3c8a
https://doi.org/10.1109/jmems.2011.2127457
https://doi.org/10.1109/jmems.2011.2127457
Autor:
A.M. Molenbroek, J.F. Creemer, Stig Helveg, Patricia J. Kooyman, Pasqualina M. Sarro, Hendrik Willem Zandbergen
Publikováno v:
Journal of Microelectromechanical Systems. 19:254-264
We present a microelectromechanical systems (MEMS) nanoreactor that enables high-resolution transmission electron microscopy (TEM) (HRTEM) of nanostructured materials with atomic-scale resolution during exposure to reactive gases at 1 atm of pressure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2edf96e06970fe820ea1c45455a07e55
https://doi.org/10.1109/jmems.2010.2041190
https://doi.org/10.1109/jmems.2010.2041190
Publikováno v:
24th Eurosensors Conference, 5 September 2010 through 8 September 2010, Linz. Conference code: 83056, 5, 969-972
Procedia Engineering, 5, 2010
Procedia Engineering, 5, 2010
A new design of micro-evaporators, with 45 channels (View the MathML source100?m deep) and diamond-shaped fins (View the MathML source40?m wide, View the MathML source160?m long, View the MathML source20?m separation), is fabricated by anodic bonding
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::32c451d3ae04eb3af2e8b8d7bb0e006a
Publikováno v:
Journal of Microelectromechanical Systems. 17:1546-1555
The novel design of a sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force-sensing cantilever beams is presented. The actuator consists of a silicon comb structure with an aluminum heater on top and filled p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9505fc36e527edef1d0a646b7b4b024c
https://doi.org/10.1109/jmems.2008.2007268
https://doi.org/10.1109/jmems.2008.2007268
Publikováno v:
IEEE Sensors Journal. 7:96-104
A novel two-dimensional piezoresistive nano-Newton resolution force sensing cantilever is presented. The silicon cantilever is fabricated using bulk micromachining. Two 500-nm-thick p-doped epitaxial silicon piezoresistive sensors are located on both
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::040e5c6ecc8f0ce279f4cd6f2eab2bac
https://doi.org/10.1109/jsen.2006.886992
https://doi.org/10.1109/jsen.2006.886992