Zobrazeno 1 - 10 of 14 pro vyhledávání: '"J. Y. Parey"'
1
Complete Mueller matrix measurement with a single high frequency modulation
Autor: Jean Eric Bourée, Eric Compain, J. Y. Parey, Bernard Drevillon, Jean Huc
Publikováno v: Thin Solid Films. :47-52
A new Mueller matrix ellipsometer (MME) is presented. It provides the simultaneous measurement of the 16 Mueller matrix coefficients in four modulation periods (80 μs under the present conditions). This system is accurate (error≤1%), robust since
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0c747b63fead4d575a637a415abf4802
https://doi.org/10.1016/s0040-6090(97)00767-0
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2
Dual-plasma reactor for low temperature deposition of wide band-gap silicon alloys
Autor: J. Y. Parey, R. Etemadi, J.C. Rostaing, J. Huc, F. Coeuret, Jérôme Perrin, Christian Godet, Bernard Drevillon
Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 15:320-331
A dual-plasma [surface wave-coupled microwave (MW) at 2.45 GHz and capacitively coupled radio frequency (rf) at 13.56 MHz] reactor called MORFAX was developed for the deposition of amorphous wide band-gap alloys (a-SiOx:H, a-SiNy:H) at high growth ra
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7f3fc167644925af816efe2f9e3a9a35
https://doi.org/10.1116/1.580487
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4
Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD
Autor: V.A. Yakovlev, Christian Godet, Bernard Drevillon, F. Coeuret, J. Huc, J. Y. Parey, J.C. Rostaing, R. Etemadi
Publikováno v: Thin Solid Films. 236:58-63
Protective transparent coatings have been deposited on polycarbonate and CR 39 by dual mode MW/r.f. plasma-enhanced chemical vapour deposition from silane. The layer sequence consists of appropriate adhesion-promoting pretreatment, an intermediate co
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c8007fb94d09f54f6abd42b34eab2eb5
https://doi.org/10.1016/0040-6090(93)90642-3
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5
Performance of the ALEPH detector at LEP
Autor: D Buskulic, D Casper, I De Bonis, D Decamp, P Ghez, C Goy, J.-P Lees, M.-N Minard, P Odier, B Pietrzyk, F Ariztizabal, M Chmeissani, J.M Crespo, I Efthymiopoulos, E Fernandez, M Fernandez-Bosman, V Gaitan, Ll Garrido, M Martinez, T Mattison, S Orteu, A Pacheco, C Padilla, F Palla, A Pascual, J.A Perlas, F Sanchez, F Teubert, F Chiumarulo, A Clemente, D Creanza, M de Palma, A Farilla, R Ferorelli, G Iaselli, G Maggi, N Marinelli, A Mastrogiacomo, S Natali, V Negro, S Nuzzo, M Papagni, C Pinto, A Ranieri, G Raso, F Romano, F Ruggieri, G Selvaggi, L Silvestris, P Tempesta, G Zito, Y Chai, D Huang, X Huang, J Lin, T Wang, Y Xie, D Xu, R Xu, J Zhang, L Zhang, W Zhao, H Albrecht, A Ball, R Benetta, F Bird, E Blucher, G Bonvicini, J Boudreau, T Charity, P Comas, P Coyle, H Drevermann, A Engelhardt, M Ferro-Luzzi, L Foà, R.W Forty, M Frank, G Ganis, C Gay, M Girone, C Grab, R Grabit, J Griffith, R Grub, R Hagelberg, J Harvey, B Ivesdal, R Jacobsen, P Jarron, B Jost, M Kasemann, G Kellner, J Knobloch, A Lacourt, P Lazeyras, I Lehraus, B Lofstedt, T Lohse, D Lütze, M Maggi, A Marchioro, C Markou, E.B Martin, P Mato, J.-M Maugain, J May, H Meinhard, V Mertens, A Minten, A Miotto, R Miquel, P Palazzi, J.R Pater, P Perrodo, R Pintus, L Pregernig, M Price, J.-F Pusztaszeri, F Ranjard, J Richstein, W Richter, L Rolandi, H Rotscheidt, W von Ruden, M Saich, J.-C Santiard, P Schilly, D Schlatter, M Schmelling, G Stefanini, H Taureg, W Tejessy, I.R Tomalin, R Veenhof, A Venturi, H Verweij, H Wachsmuth, H Wahl, S Wheeler, W Wiedenmann, T Wildish, W Witzeling, J Wotschack, Z Ajaltouni, M Bardadin-Otwinowska, A Barres, C Boyer, M Brossard, R Chadelas, F Daudon, A Falvard, P Gay, C Guicheney, P Henrard, J Jousset, B Michel, J-C Montret, D Pallin, P Perret, F Podlyski, J Proriol, F Saadi, H Bertelsen, T Fearnley, F Hansen, J.B Hansen, J.D Hansen, J.R Hansen, P.H Hansen, S.D Johnson, A Lindahl, B Madsen, R Møllerud, B.S Nilsson, G Petersen, A Kyriakis, E Simopoulou, I Siotis, A Vayaki, K Zachariadou, M Bercher, U Berthon, A Blondel, G Bonneaud, J.C Brient, P Bourdon, A Busata, M Cerutti, J Doublet, G Fouque, C Lemoine, P Matricon, M Maubras, R Morano, J.-Y Parey, L Passalacqua, P Poilleux, A Rougé, C Roy, M Rumpf, R Tanaka, A Valassi, M Verderi, H Videau, C Violet, D.J Candlin, A.J Main, M.I Parsons, E Veitch, E Focardi, G Parrini, E Scarlini, M Corden, M Delfino, C Georgiopoulos, D.E Jaffe, D Levinthal, M Anelli, A Antonelli, A Balla, G Bencivenni, G Bologna, R Bonini, F Bossi, P Campana, G Capon, M Carletti, F Cerutti, V Chiarella, G Corradi, B Dulach, G Felici, P Laurelli, G Mannocchi, F Murtas, G.P Murtas, M Pepe-Altarelli, P Picchi, S Salomone, M Santoni, P Colrain, I ten Have, I.G Knowles, J.G Lynch, W Maitland, W.T Morton, C Raine, P Reeves, J.M Scarr, K Smith, M.G Smith, A.S Thompson, S Thorn, R.M Turnbull, U Becker, B Brandl, O Braun, R Geiges, C Geweniger, P Hanke, V Hepp, W Heyde, E.E Kluge, J Krause, Y Maumary, M Panter, A Putzer, B Rensch, M Schmidt, K Schmitt, A Stahl, H Stenzel, K Tittel, M Wunsch, G.J Barber, R Beuselinck, D.M Binnie, W Cameron, M Cattaneo, D.J Colling, P.J Dorna, D.N Gentry, J.F Hassard, N Konstantinidis, D.G Miller, L Moneta, A Moutoussi, J Nash, D.G Payne, D.R Price, G San Martin, J.K Sedgbeer, A.G Wright, P Girtler, D Kuhn, G Rudolph, R Vogl, C.K Bowdery, T.J Brodbeck, A.J Finch, F Foster, G Hughes, D Jackson, N.R Keemer, M Nuttall, A Patel, T Sloan, S.W Snow, E.P Whelan, L.A.T Bauerdick, A Galla, A.M Greene, K Kleinknecht, J Raab, B Renk, H.-G Sander, H Schmidt, S.M Walther, R Wanke, B Wolf, A.M Bencheikh, C Benchouk, M Billaut, A Bonissent, D Calvet, J Carr, C Diaconu, F Etienne, Y Gally, D Nicod, P Payre, L Roos, D Rousseau, P Schwemling, M Talby, I Abt, K Ackermann, S Adlung, R Assmann, C Bauer, H Becker, W Blum, D Brown, P Cattaneo, B Dehning, H Dietl, F Dydak, H Fischer, A.W Halley, D Hauff, P Holl, K Jakobs, W Kothhuber, H Kroha, J Lauber, G Lütjens, G Lutz, W Männer, H.-G Moser, R Richter, J Schröder, A.S Schwarz, R Settles, H Seywerd, H Stieg, U Stiegler, U Stierlin, R.St Denis, L Strüder, G Waltermann, P Weissbach, G Wolf, J.-N Albert, R Alemany, C Arnault, R Bernier, J Boucrot, O Callot, R Chase, A Cordier, M Davier, M Dialinas, A Ducorps, L Duflot, J.-F Grivaz, Ph Heusse, P Janot, Ph Jean, D.W Kim, F Le Diberder, J Lefrançois, A.-M Lutz, G Musolino, H.J Park, J.-P Richer, M.-H Schune, J.-J Veillet, I Videau, D Abbaneo, C Avanzini, G Bagliesi, G Batignani, A Bechini, F Bosi, U Bottigli, C Bozzi, C Bradaschia, G Calderini, M Carpinelli, C Cerri, M.A Ciocci, V Ciulli, R Dell'Orso, R Fantechi, I Ferrante, F Fidecaro, F Forti, A Giassi, M.A Giorgi, A Gregorio, F Ligabue, R Lorenzini, A Lusiani, P.S Marrocchesi, A Messineo, G Pagani, G Pierazzini, A Profeti, G Rizzo, G Sanguinetti, P Spagnolo, J Steinberger, R Tenchini, G Tonelli, G Triggiani, C Vannini, P.G Verdini, J Walsh, A.P Betteridge, Y Gao, M.G Green, B.J Green, D.L Johnson, P.V March, T Medcalf, Ll.M Mir, I.S Quazi, J.A Strong, V Bertin, J Bizzell, D.R Botterill, R.W Clifft, T.R Edgecock, S Haywood, M Edwards, P.R Norton, J.C Thompson, A.W Tucker, D Bederede, R Bernard, E Beuville, B Bloch-Devaux, P Colas, H Desportes, H Duarte, S Emery, L Gosset, J Heitzmann, M Jacquemet, A Joudon, W Kozanecki, E Lançon, M.C Lemaire, E Locci, J.C Lottin, P Micolon, J Pascual, P Perez, J Rander, J.-F Renardy, A Rosowsky, A Roussarie, J.-P Schuller, J Schwindling, D Si Mohand, B Vallage, R.P Johnson, A.M Litke, G Taylor, J Wear, A Beddall, C.N Booth, S Cartwright, F Combley, I Dawson, A Koksal, C Rankin, L.F Thompson, A Böhrer, S Brandt, G Cowan, E Feigl, G Gillessen, C Grupen, G Lutters, J Minguet-Rodriguez, F Rivera, P Saraiva, U Schäfer, L Smolik, L Bosisio, R Della Marina, G Giannini, B Gobbo, L Pitis, F Ragusa, J Rothberg, S Wasserbaech, L Bellantoni, A Caldwell, D Cinabro, J.S Conway, D.F Cowen, Z Feng, D.P.S Ferguson, Y.S Gao, J Grahl, J.L Harton, O.J Hayes, H Hu, J Izen, R.C Jared, D Muller, J.M Nachtman, Y.B Pan, Y Saadi, M Schmitt, I Scott, V Sharma, D Strom, M Takashima, J.D Turk, A.M Walsh, F.V Weber, E Wicklund, Sau Lan Wu, X Wu, J.M Yamartino, M Zheng, G Zobernig
Publikováno v: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Elsevier, 1995, 360, pp.481-506
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1995, 360, pp.481-506
Scopus-Elsevier
The performance of the ALEPH detector at the LEP e+e-collider is reviewed. The accuracy of the tracking detectors to measure the impact parameter and momentum of charged tracks is specified. Calorimeters are used to measure photons and neutral hadron
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5dd5208d0ac3903283ff7f17f9cb7f7a
http://hal.in2p3.fr/in2p3-00002096/document
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6
The H1 detector at HERA
Autor: I. Abt, T. Ahmed, S. Aid, V. Andreev, B. Andrieu, R.D. Appuhn, C. Arnault, M. Arpagaus, A. Babaev, H. Bärwolff, J. Bán, E. Banas, P. Baranov, E. Barrelet, W. Bartel, M. Barth, U. Bassler, F. Basti, D.E. Baynham, J.-M. Baze, G.A. Beck, H.P. Beck, D. Bederede, H.-J. Behrend, C. Beigbeder, A. Belousov, Ch. Berger, H. Bergstein, R. Bernard, G. Bernardi, R. Bernet, R. Bernier, U. Berthon, G. Bertrand-Coremans, M. Besançon, R. Beyer, J.-C. Biasci, P. Biddulph, V. Bidoli, E. Binder, P. Binko, J.-C. Bizot, V. Blobel, F. Blouzon, H. Blume, K. Borras, V. Boudry, C. Bourdarios, F. Brasse, W. Braunschweig, D. Breton, H. Brettel, V. Brisson, D. Bruncko, C. Brune, U. Buchner, L. Büngener, J. Bürger, F.W. Büsser, A. Buniatian, S. Burke, P. Burmeister, A. Busata, G. Buschhorn, A.J. Campbell, T. Carli, F. Charles, M. Charlet, R. Chase, D. Clarke, A.B. Clegg, M. Colombo, V. Commichau, J.F. Connolly, U. Cornett, J.A. Coughlan, A. Courau, M.-C. Cousinou, Ch. Coutures, A. Coville, G. Cozzika, D.A. Cragg, L. Criegee, H.I. Cronström, N.H. Cunliffe, J. Cvach, A. Cyz, S. Dagoret, J.B. Dainton, M. Danilov, A.W.E. Dann, D. Darvill, W.D. Dau, J. David, M. David, R.J. Day, E. Deffur, B. Delcourt, L. Del Buono, F. Descamps, M. Devel, J.P. Dewulf, A. De Roeck, P. Dingus, K. Djidi, C. Dollfus, J.D. Dowell, H.B. Dreis, A. Drescher, U. Dretzler, J. Duboc, A. Ducorps, D. Düllmann, O. Dünger, H. Duhm, B. Dulny, F. Dupont, R. Ebbinghaus, M. Eberle, J. Ebert, T.R. Ebert, G. Eckerlin, B.W.H. Edwards, V. Efremenko, S. Egli, S. Eichenberger, R. Eichler, F. Eisele, E. Eisenhandler, N.N. Ellis, R.J. Ellison, E. Elsen, A. Epifantsev, M. Erdmann, W. Erdmann, G. Ernst, E. Evrard, G. Falley, L. Favart, A. Fedotov, D. Feeken, R. Felst, J. Feltesse, Z.Y. Feng, I.F. Fensome, J. Fent, J. Ferencei, F. Ferrarotto, K. Finke, K. Flamm, W. Flauger, M. Fleischer, M. Flieser, P.S. Flower, G. Flügge, A. Fomenko, B. Fominykh, M. Forbush, J. Formánek, J.M. Foster, G. Franke, E. Fretwurst, W. Fröchtenicht, P. Fuhrmann, E. Gabathuler, K. Gabathuler, K. Gadow, K. Gamerdinger, J. Garvey, J. Gayler, E. Gažo, A. Gellrich, M. Gennis, U. Gensch, H. Genzel, R. Gerhards, K. Geske, I. Giesgen, D. Gillespie, W. Glasgow, L. Godfrey, J. Godlewski, U. Goerlach, L. Goerlich, N. Gogitidze, M. Goldberg, A.M. Goodall, I. Gorelov, P. Goritchev, L. Gosset, C. Grab, H. Grässler, R. Grässler, T. Greenshaw, C. Gregory, H. Greif, M. Grewe, G. Grindhammer, A. Gruber, C. Gruber, S. Günther, J. Haack, M. Haguenauer, D. Haidt, L. Hajduk, D. Hammer, O. Hamon, M. Hampel, D. Handschuh, K. Hangarter, E.M. Hanlon, M. Hapke, U. Harder, J. Harjes, P. Hartz, P.E. Hatton, R. Haydar, W.J. Haynes, J. Heatherington, V. Hedberg, C.R. Hedgecock, G. Heinzelmann, R.C.W. Henderson, H. Henschel, R. Herma, I. Herynek, W. Hildesheim, P. Hill, D.L. Hill, C.D. Hilton, J. Hladký, K.C. Hoeger, R.B. Hopes, R. Horisberger, A. Hrisoho, J. Huber, Ph. Huet, H. Hufnagel, N. Huot, J.-F. Huppert, M. Ibbotson, D. Imbault, H. Itterbeck, M.-A. Jabiol, A. Jacholkowska, C. Jacobsson, M. Jaffré, T. Jansen, P. Jean, J. Jeanjean, L. Jönsson, K. Johannsen, D.P. Johnson, L. Johnson, P. Jovanovic, H. Jung, P.I.P. Kalmus, D. Kant, G. Kantel, S. Karstensen, S. Kasarian, R. Kaschowitz, P. Kasselmann, U. Kathage, H.H. Kaufmann, G. Kemmerling, I.R. Kenyon, S. Kermiche, C. Keuker, C. Kiesling, M. Klein, C. Kleinwort, G. Knies, W. Ko, T. Kobler, J. Koch, T. Köhler, J. Köhne, M. Kolander, H. Kolanoski, F. Kole, J. Koll, S.D. Kolya, B. Koppitz, V. Korbel, M. Korn, P. Kostka, S.K. Kotelnikov, M.W. Krasny, H. Krehbiel, F. Krivan, D. Krücker, U. Krüger, U. Krüner-Marquis, M. Kubantsev, J.P. Kubenka, T. Külper, H.-J. Küsel, H. Küster, M. Kuhlen, T. Kurča, J. Kurzhöfer, B. Kuznik, B. Laforge, F. Lamarche, R. Lander, M.P.J. Landon, W. Lange, R. Langkau, P. Lanius, J.-F. Laporte, L. Laptin, H. Laskus, A. Lebedev, M. Lemler, U. Lenhardt, A. Leuschner, C. Leverenz, S. Levonian, D. Lewin, Ch. Ley, A. Lindner, G. Lindström, F. Linsel, J. Lipinski, B. Liss, P. Loch, A.B. Lodge, H. Lohmander, G.C. Lopez, J.-P. Lottin, V. Lubimov, K. Ludwig, D. Lüers, N. Lugetski, B. Lundberg, K. Maeshima, N. Magnussen, E. Malinovski, S. Mani, P. Marage, J. Marks, R. Marshall, J. Martens, F. Martin, G. Martin, R. Martin, H.-U. Martyn, J. Martyniak, V. Masbender, S. Masson, A. Mavroidis, S.J. Maxfield, S.J. McMahon, A. Mehta, K. Meier, J. Meissner, D. Mercer, T. Merz, C.A. Meyer, H. Meyer, J. Meyer, S. Mikocki, J.L. Mills, V. Milone, J. Möck, E. Monnier, B. Montés, F. Moreau, J. Moreels, B. Morgan, J.V. Morris, J.M. Morton, K. Müller, P. Murín, S.A. Murray, V. Nagovizin, B. Naroska, Th. Naumann, P. Nayman, A. Nepeipivo, P. Newman, D. Newman-Coburn, D. Newton, D. Neyret, H.K. Nguyen, F. Niebergall, C. Niebuhr, R. Nisius, T. Novák, H. Nováková, G. Nowak, G.W. Noyes, M. Nyberg, H. Oberlack, U. Obrock, J.E. Olsson, J. Olszowska, S. Orenstein, F. Ould-Saada, P. Pailler, S. Palanque, E. Panaro, A. Panitch, J.-Y. Parey, C. Pascaud, G.D. Patel, A. Patoux, C. Paulot, U. Pein, E. Peppel, E. Perez, P. Perrodo, A. Perus, S. Peters, J.-P. Pharabod, H.T. Phillips, J.P. Phillips, Ch. Pichler, A. Pieuchot, W. Pimpl, D. Pitzl, A. Porrovecchio, S. Prell, R. Prosi, H. Quehl, G. Rädel, F. Raupach, K. Rauschnabel, A. Reboux, P. Reimer, G. Reinmuth, S. Reinshagen, P. Ribarics, V. Riech, J. Riedlberger, H. Riege, S. Riess, M. Rietz, S.M. Robertson, P. Robmann, P. Röpnack, R. Roosen, K. Rosenbauer, A. Rostovtsev, C. Royon, A. Rudge, K. Rüter, M. Rudowicz, M. Ruffer, S. Rusakov, V. Rusinov, K. Rybicki, J. Sacton, N. Sahlmann, E. Sanchez, D.P.C. Sankey, M. Savitski, P. Schacht, S. Schiek, N. Schirm, S. Schleif, P. Schleper, W. von Schlippe, C. Schmidt, D. Schmidt, G. Schmidt, W. Schmitz, H. Schmücker, V. Schröder, J. Schütt, E. Schuhmann, M. Schulz, A. Schwind, W. Scobel, U. Seehausen, F. Sefkow, R. Sell, M. Seman, A. Semenov, P. Shatalov, V. Shekelyan, I. Sheviakov, H. Shooshtari, L.N. Shtarkov, G. Siegmon, U. Siewert, Y. Sirois, A. Sirous, I.O. Skillicorn, P. Škvařil, P. Smirnov, J.R. Smith, L. Smolik, D. Sole, Y. Soloviev, J. Špalek, H. Spitzer, R. von Staa, J. Staeck, P. Staroba, J. Šťastný, M. Steenbock, P. Štefan, P. Steffen, R. Steinberg, H. Steiner, B. Stella, K. Stephens, J. Stier, J. Stiewe, U. Stösslein, J. Strachota, U. Straumann, A. Strowbridge, W. Struczinski, J.P. Sutton, Z. Szkutnik, G. Tappern, S. Tapprogge, R.E. Taylor, V. Tchernyshov, V. Tchudakov, C. Thiebaux, K. Thiele, G. Thompson, R.J. Thompson, I. Tichomirov, C. Trenkel, W. Tribanek, K. Tröger, P. Truöl, M. Turiot, J. Turnau, J. Tutas, L. Urban, M. Urban, A. Usik, Š. Valkár, A. Valkárová, C. Vallée, G. Van Beek, M. Vanderkelen, L. Van Lancker, P. Van Mechelen, A. Vartapetian, Y. Vazdik, M. Vecko, P. Verrecchia, R. Vick, G. Villet, E. Vogel, K. Wacker, M. Wagener, I.W. Walker, A. Walther, G. Weber, D. Wegener, A. Wegner, P. Weissbach, H.P. Wellisch, L. West, D. White, S. Willard, M. Winde, G.-G. Winter, Th. Wolff, L.A. Womersley, A.E. Wright, E. Wünsch, N. Wulff, B.E. Wyborn, T.P. Yiou, J. Žáček, D. Zarbock, P. Závada, C. Zeitnitz, Z. Zhang, H. Ziaeepour, M. Zimmer, W. Zimmermann, F. Zomer, K. Zuber
Publikováno v: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Elsevier, 1997, 386, pp.310-347
INSPIRE-HEP
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1997, 386, pp.310-347
HAL
General aspects of the H1 detector at the electron-proton storage ring HERA as well as technical descriptions of the magnet, luminosity system, trigger, slow-control, data acquisition and off-line data handling are given. The three major components o
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bb5827b941eaee0fe8f832135edd95d6
http://hal.in2p3.fr/in2p3-00012908
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7
Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVD
Autor: A. R. Middya, J. L. Moncel, A. Lloret, Jérôme Perrin, J. Huc, G. Rose, J. Y. Parey
Publikováno v: MRS Proceedings. 377
Polycrystalline silicon thin films have been deposited at fast growth rates (50 Å/s) by hotwire chemical vapour deposition (HW-CVD) from SiH4/H2 gas mixtures at low substrate temperature (400–500°C). The surface morphology of these films consists
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f559bcebac747eba415d6a28df78e9d0
https://doi.org/10.1557/proc-377-119
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8
Design Of A New In Situ Spectroscopic Phase Modulated Ellipsometer
Autor: Ramdane Benferhat, Yves Josserand, B. Schlayen, M. Stchakovsky, J. Y. Parey, Bernard Drevillon
Publikováno v: Multichamber and In-Situ Processing of Electronic Materials.
A new spectroscopic phase modulated ellipsometer (SPME) is presented. As compared to other ellipsometric techniques like rotating analyzer ellipsometry (RAE), the phase modulation uses a high frequency modulation (50 kHz) provided by a photoelastic m
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4d2fa7485a85473fbbd9ec8b479fc016
https://doi.org/10.1117/12.963951
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9
P-4: Microcrystalline Silicon TFTs for Active Matrix Displays
Autor: Yvan Bonnassieux, Van Diep Bui, Hyun Jae Kim, A. Abramov, Pere Roca i Cabarrocas, J. Y. Parey, Y. Djeridane
Publikováno v: SID Symposium Digest of Technical Papers. 37:204
Microcrystalline silicone (μ-Si:H) TFTs were fabricated using a conventional bottom gate amorphous Si (a-Si:H) process. A unique μc-Si:H deposition technique and TFT architecture was proposed to enhance the reliability of the TFTs. This three-mask
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d561692e2732cf08835de091bb937fe6
https://doi.org/10.1889/1.2433454
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