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pro vyhledávání: '"J. Ogard"'
Autor:
R. Hollingsworth, G. Patel, J. Ogard, B. Carpenter, P.K. Bhat, C. Marshall, T. L. Wangensteen, R. Treece, I. L. Eisgruber
Materials Research Group (MRG), Inc., is developing in-situ sensors to improve yield, reproducibility, average efficiency, and prevention of ''lost processes.'' In-situ X-ray fluorescence (XRF) will be used to monitor composition and thickness of dep
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f749a22aa65f3f95dbeb496e916d901b
https://doi.org/10.2172/14424
https://doi.org/10.2172/14424
