Highly selective etch process for silicon-on-insulator nano-devices

Autor: W. Henschel, Max C. Lemme, T. Mollenhauer, Johnson Kwame Efavi, Yordan M. Georgiev, Heinrich Kurz, J. Niehusmann, H. D. B. Gottlob, Thorsten Wahlbrink, P. Haring Bolivar

Publikováno v: Microelectronic Engineering. :212-217

Reactive ion etch (RIE) processes with HBr/O"2 chemistry are optimized for processing of functional nanostructures based on silicon and polysilicon. The etch rate, etch selectivity, anisotropy and sidewall roughness are investigated for specific appl

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9b9f297f80c3b0499738ae792d7c7367
https://doi.org/10.1016/j.mee.2004.12.029

High-speed all-optical switching in ion-implanted silicon-on-insulator microring resonators

Autor: Tobias Plötzing, J. Niehusmann, Michael Först, Jens Bolten, Christian Moormann, Heinrich Kurz, Thorsten Wahlbrink

Publikováno v: Optics letters. 32(14)

We demonstrate high-speed all-optical switching via vertical excitation of an electron-hole plasma in an oxygen-ion implanted silicon-on-insulator microring resonator. Based on the plasma dispersion effect the spectral response of the device is rapid

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3e5a1f479719957d0b935532d40da56d
https://pubmed.ncbi.nlm.nih.gov/17632638

Ultrafast all-optical wavelength conversion in silicon waveguides using femtosecond pump-probe pulses

Autor: Thorsten Wahlbrink, J. Niehusmann, Alfred Driessen, Christian Moormann, Ronald Dekker, Michael Först

Publikováno v: European Conference on Optical Communications, ECOC 2006, 127-128
STARTPAGE=127;ENDPAGE=128;TITLE=European Conference on Optical Communications, ECOC 2006

Experimental results on ultrafast all-optical wavelength conversion in Silicon-on-Insulator waveguides are presented. Red and blue shifts of 10nm have been observed in femtosecond pump-probe experiments. All-optical switching and the importance of wa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d02b32fdb4c9dfa554815dbeec0e646a
https://doi.org/10.1109/ecoc.2006.4800987

Photonic engineering of nonlinear-optical properties of hybrid materials for efficient ultrafast optical switching (PHOENIX)

Autor: Nikolaj Moll, Rainer F. Mahrt, J. Niehusmann, Thorsten Wahlbrink, Roberto Zamboni, Michele Muccini, P.H. Bolivar, Francois Kajzar

Publikováno v: Organic Optoelectronics and Photonics, edited by Paul L. Heremans; Michele Muccini; Hans Hofstraa, pp. 39–43. BELLINGHAM, WA 98227-0010: SPIE-INT SOC OPTICAL ENGINEERING, 2004
info:cnr-pdr/source/autori:Niehusmann, J; Bolivar, PH; Wahlbrink, T; Mahrt, RF; Moll, N; Zamboni, R; Muccini, M; Kajzar, F/titolo:Photonic engineering of nonlinear-optical properties of hybrid materials for efficient ultrafast optical switching (PHOENIX)/titolo_volume:Organic Optoelectronics and Photonics/curatori_volume:Paul L. Heremans; Michele Muccini; Hans Hofstraa/editore: /anno:2004

The phoenix project aims to develop all-optical switches based on the combination of inorganic and organic materials in hybrid devices. We present first results in developing low-loss ring resonators fabricated in silicon-on-insulator (SOI) technolog

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::71bd76de543ffd969d7ce015ad1cf720
https://doi.org/10.1117/12.548975

Ultrahigh-quality-factor silicon-on-insulator microring resonator

Autor: P.H. Bolivar, J. Niehusmann, Heinrich Kurz, W. Henschel, Thorsten Wahlbrink, Andreas Vörckel

Publikováno v: Optics Letters. 29:2861

The development of ultrahigh-quality-factor (Q) silicon-on-insulator (SOI) microring resonators based on silicon wire waveguides is presented. An analytical description is derived, illustrating that in addition to low propagation losses the critical

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::93585e158ca2395586177ba8aff0cfe0
https://doi.org/10.1364/ol.29.002861