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Publikováno v:
SPIE Proceedings.
Among existing x ray diffraction diagnostics nonperfections of crystals the specific location take methods are based on use of x-ray dynamic diffraction effects. From them the most sensitive are based on interferention. The Pendellosung and Moire fri
Publikováno v:
SPIE Proceedings.
There are more than a dozen different methods of diagnostic and control of the structural purity of materials which are used in modern micro- and optoelectronics. Each of them has their own strong and weak points, range and fields of use. Usually a c