Zobrazeno 1 - 10
of 14
pro vyhledávání: '"J. L. Munoz-Gamarra"'
Autor:
M. Vinet, Louis Hutin, Giulia Usai, Thomas Ernst, J. L. Munoz-Gamarra, T. J. King Liu, Urmita Sikder
Publikováno v:
2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).
This work provides guidelines aiming at obtaining a functional, non-volatile and reprogrammable NEM relay design for ultra-low power hybrid NEMS/CMOS circuits addressing various non-volatile memory applications operating at a fixed supply voltage Vdd
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d26f0d8109a5c8f592651ac5163011bc
https://doi.org/10.1109/s3s.2017.8309215
https://doi.org/10.1109/s3s.2017.8309215
Publikováno v:
Microelectronic Engineering. 119:127-130
Display Omitted MEMS switches integrated in a CMOS technology using Back-End layers (based on aluminum).Easy and reproducible fabrication process.Abrupt behavior (5mV/decade), good ION/IOFF ratio (1x103) and good reliability (more than 20 cycles). In
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b32c1f333c522143a9de2e217959e42
https://doi.org/10.1016/j.mee.2014.03.036
https://doi.org/10.1016/j.mee.2014.03.036
Publikováno v:
Procedia Engineering. 87:943-946
This work demonstrates the monolithically integration of NEMS structures in a commercial CMOS technology. Low voltage operating switches (5 V) have been obtained thanks to the definition of a small structure (1.5 μm length, 500 nm width) and a small
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0c13241baa2c018bea43c865c477d1f5
Publikováno v:
Sensors and Actuators A: Physical. 197:88-95
This paper reports on the study and characterization of the non-linear regime of two CMOS-NEMS flexural resonators electrically transduced for mechanical memory applications. A cantilever and a clamped–clamped beam nanoelectromechanical resonators
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a015c9c00a8e33601c0bbc20ed34267
https://doi.org/10.1016/j.sna.2013.03.032
https://doi.org/10.1016/j.sna.2013.03.032
Publikováno v:
2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO).
A renewed interest in mechanical computing has emerged in Microelectronics in the last years as a solution to the increasing static power density of CMOS technologies as they are scaled down. Nano-electromechanical (NEMS) switches can be used as the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::adf7a5eca1d45b37fb599f4a03a7c400
https://doi.org/10.1109/nano.2016.7751407
https://doi.org/10.1109/nano.2016.7751407
Publikováno v:
Dipòsit Digital de Documents de la UAB
Universitat Autònoma de Barcelona
Micromachines
Micromachines, Vol 7, Iss 2, p 30 (2016)
Micromachines; Volume 7; Issue 2; Pages: 30
Universitat Autònoma de Barcelona
Micromachines
Micromachines, Vol 7, Iss 2, p 30 (2016)
Micromachines; Volume 7; Issue 2; Pages: 30
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ac0685cceaf4269e7ba884f4404af63
https://ddd.uab.cat/record/167678
https://ddd.uab.cat/record/167678
Autor:
Eric Colinet, J. Giner, Arantxa Uranga, J. L. Munoz-Gamarra, E. Marigo, Julien Arcamone, Nuria Barniol
Publikováno v:
Microelectronic Engineering. 98:599-602
This work presents a technique to cancel the parasitic feedthrough current in a fully CMOS integrated electrostatic micromechanical resonator. A four-electrode balanced topology has been proven to enhance the measured response of a polysilicon clampe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0eae568e69ec05cfb6182c8838d743d1
https://doi.org/10.1016/j.mee.2012.05.062
https://doi.org/10.1016/j.mee.2012.05.062
Autor:
J. Giner, E. Marigo, G. Vidal, Francesc Torres, Arantxa Uranga, Nuria Barniol, J. L. Munoz-Gamarra
Publikováno v:
Microelectronic Engineering. 88:2325-2329
In this contribution cross coupled beams MEMS resonator is presented in order to excite second in-plane flexural mode and provide more transduction area than a single beam in order to enhance the electrostatic signal measurement employing capacitive
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ecccf5fdaa8fe8694a9a557e867bb7b1
https://doi.org/10.1016/j.mee.2011.02.100
https://doi.org/10.1016/j.mee.2011.02.100
Publikováno v:
Dipòsit Digital de Documents de la UAB
Universitat Autònoma de Barcelona
Universitat Autònoma de Barcelona
We report experimental demonstrations of contact-mode nano-electromechanical switches obtained using a capacitor module based on metal-insulator-metal configuration of a standard commercial complementary metal oxide semiconductor technology. The deve
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::85fee89931b239b7db533c4a09daf2d6
https://ddd.uab.cat/record/182944
https://ddd.uab.cat/record/182944
Publikováno v:
2012 IEEE International Symposium on Circuits and Systems (ISCAS 2012)
2012 IEEE International Symposium on Circuits and Systems (ISCAS 2012), May 2012, Seoul, South Korea. pp.2103-2106, ⟨10.1109/ISCAS.2012.6271700⟩
ISCAS
2012 IEEE International Symposium on Circuits and Systems (ISCAS 2012), May 2012, Seoul, South Korea. pp.2103-2106, ⟨10.1109/ISCAS.2012.6271700⟩
ISCAS
International audience; This work introduces a MEMS oscillator composed exclusively of mechanical switches as logic components. The electromechanical model of the system is developed and the conditions for a periodic response are established.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e1d9e1e2858af699528a017a575d1e32
https://hal-supelec.archives-ouvertes.fr/hal-00725674
https://hal-supelec.archives-ouvertes.fr/hal-00725674